Our 5,000-square-foot clean room is used by Princeton University students, faculty, staff, and other researchers to fabricate semiconductor, microfluidic, and MEMS devices. The laboratory consists of class 1000 rooms for deposition and etch, a class 100 room for lithography, a separate electron beam lithography cleanroom, a lapping/polishing lab, and a packaging lab.
A special strength of the lab is the ability to handle a wide variety of substrates in our tools, from the usual III-V and silicon semiconductor substrates to the more unusual glass, metal, and plastic foils used in novel flexible electronics applications. Substrate sizes range from a few square mm InP to 150 mm diameter Si wafers.
The lab has a complete range of fabrication tools, including:
http://www.princeton.edu/mnfl/the-tool-list/Brewer Science CEE 1100
http://www.princeton.edu/mnfl/the-tool-list/Electronic Micro Systems 1000-1/