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FEI Quanta 200 FEG Environmental-SEM

Instrument types

The Quanta 200 FEG ESEM is a special type of high performance scanning electron microscope (SEM). It is equipped with a Schottky field emission gun (FEG) for optimal spatial resolution. The instrument can be used in high vacuum mode (HV), low-vacuum mode (LV) and the so called ESEM (Environmental SEM) mode. This makes it possible to study samples in pressures up to 30 Torr. The microscope is equipped with a peltier stage for studies of wet samples in-situ. There are cooling and heating stages available for in-situ experiments at temperatures ranging from -20°C up to 1500°C. This can be done in combination with having an external gas present in the chamber, e.g. air, for studying chemical reactions, such as oxidation, at high temperatures.