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Scanning Auger Microscope

Make / Model : 

Perkin Elmer PHI 670

Scanning Auger microscope. FE Source with <100na current, variable KV from 0.1 to 25 KV. Argon ION sputtering for depth profiles. Same spectral resolution as XPS. Beam spot size of ~15nm at 25 KV.

Remote Access to Instrument: 
No