Perkin Elmer PHI 670
Scanning Auger microscope. FE Source with <100na current, variable KV from 0.1 to 25 KV. Argon ION sputtering for depth profiles. Same spectral resolution as XPS. Beam spot size of ~15nm at 25 KV.
MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.