Description

The Heidelberg DWL200 Mask Writer has the following options: 2mm write head (plotting speed 13.6 mm2/minute, minimum feature-600nm), 5mm write head (plotting speed 77mm2/minute, minimum feature-800nm), photomask plates for plotting 2"-8" photomasks, wafer plates for plotting 2", 4", 6", and 8" wafers, optical autofocus, gray scale lithography with 256 gray scale values, front and back side alignment, metrology tool, and two data conversion work stations for fracturing researches patterns.