Skip to:

MRFN Member Login
Program Application

Chemical bench (Prefurnace Clean)

Make / Model : 

NA

Flow hood and chemical bench for preparing substrates before thermal processing, for example in the LPCVD or oxidation furnaces. Four process tanks: Piranha bath; ammonia / hydrogen peroxide; hydrofluoric acid / hydrogen peroxide; and hydrofluoric acid.

Remote Access to Instrument: 
No