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Veeco Dektak Stylus Profilometer

Instrument types

The stylus profilometer uses a diamond tipped stylus to scan across the sample surface and measures the surface topography of thin and thick films. The vertical movements of the stylus is measured and recorded simultaneously during the scanning, which reveals the topographical structure of the surface. The instrument has vertical resolution in nanometers and horizontal resolution as small as twenty nanometers and measures the film thicknesses from 5 nm and over 500 ┬Ám.