This dual-beam FIB/SEM allows simultaneous FIB milling and SEM imaging and is equipped with a STEM detector, Bruker Quantax SDD EDS detector, Omniprobe AutoProbe and Kleindiek nanomanipulation system. Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Sidewinder FIB column provides 5nm resolution at 30kV and low energy milling capabilities.
- Five gas injection systems for etching/deposition
- STEM detector
- Bruker EDS
- Lithography capabilities
- Lift out tools for TEM and Atom Probe samples