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Hitachi SU8030

Instrument types
Make / Model : 

Hitachi SU8030

  • cold field emission technology -double condenser optics ensures not only the highest resolution;
  • full control on probe currents from 1pA to over 5nA - ideal for both, observation of even the most sensitive specimens, but also for¬†elemental analysis (EDX) where today's SDD detectors easily will achieve several 10000 counts per second.¬†
  • a large specimen chamber
  • equipped with the triple detector super ExB system
  • Oxford X-max 80 SDD EDS detector
  • standard Everhart-Thornley SE detector
  • spatial resolution of 1.0 nm at 15kV and 1.3 nm at 1kV
  • 5-axis computer controlled stage.