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Auger Electron Spectroscopy

Instrument types
Make / Model : 

Physical Electronics Model 545

  • Sample Imaging with ~ 2 µm resolution
  • Auger elemental mapping
  • Multi-spot surface analysis
  • Thin Film Elemental Depth Profiling to ~ 1µm using ion beam sputtering
  • Auger Spatial Resolution to ~ 10 µm
  • Multi-sample handling