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Cornell University

Materials Cluster

  1. Air Furnaces » Furnaces
  2. Asylum-MFP3D-Bio-AFM-SPM » Electrical Characterization, Magnetic Characterization, Optical Microscopy, Atomic Force Microscopy
  3. ATM Sonic sifter » Thermal Characterization
  4. Bruker D8 Advance ECO Powder Diffractometer » X-ray Diffraction
  5. Bruker General Area Detector Diffraction System (GADDS) » X-ray Diffraction
  6. Bruker Hyperion FT-IR Spectrometer & Microscope » Microscopy, Optical Microscopy, Polymer Characterization, Spectroscopy, FTIR/Raman Spectroscopy
  7. Bruker Vertex V80V Vacuum FTIR system » Optical Spectrometry, FTIR/Raman Spectroscopy
  8. Carver 25 ton press » Microscopy
  9. Cary 5000 UV-Vis-NIR Spectrophotometer » Optical Spectrometry
  10. Cascade Four-Point Probe » Electrical Characterization
  11. Controlled Atmosphere Furnaces » Furnaces
  12. Edinburgh FLS1000 Lifetime Fluorescence Spectrometer » Optical Microscopy, Confocal Fluorescence Microscopy, Optical Characterization, Optical Spectrometry
  13. Glass Bead Abrasive Units (sand blasting) » Synthesis and Fabrication
  14. High Vacuum Furnaces » Furnaces
  15. Hotpack Vacuum Oven » Vacuum Ovens
  16. Inert Gas Glove Box » Synthesis and Fabrication
  17. Keyence VK-X260 Laser-Scanning Confocal Microscope » Profilometry
  18. KJL Magnetron Sputtering Tool » Thin Film Deposition
  19. KSV-NIMA-KN2002-Langmuir-Blodgett-Trough » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition
  20. KSV-NIMA-KN4010-Dip-Coater » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition
  21. Lakeshore Cryogenic Probe Stations » Electrical Characterization
  22. Laurell-WS-400A-Spin-Coater » Thin Film Deposition, Polymer Processing
  23. Micromechanical Analyzer » Structural Characterization
  24. Multiwire Back-Reflection Laue Detector » X-ray Diffraction
  25. Neocera Ex200 Pulsed Laser Deposition System » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition
  26. Novocontrol Broadband Dielectric Spectrometer » Spectroscopy
  27. Novocontrol Thermal Stimulated Depolarization Current (TSDC) » Spectroscopy
  28. PPMS » PPMS, Magnetic Characterization, Thermal Characterization
  29. Recycling Preparative GPC » Polymer Characterization
  30. Renishaw InVia Confocal Raman microscope » Microscopy, Optical Microscopy, Confocal Fluorescence Microscopy, Spectroscopy, FTIR/Raman Spectroscopy
  31. Rigaku SmartLab X-Ray Diffractometer » X-ray Diffraction
  32. Sputtering Deposition System » Thin Film Deposition
  33. SQUID » SQUID Magnetometry
  34. Stationary Spot Welder (Hughes HRW250B) » Synthesis and Fabrication
  35. Struers Rotopol » STEM
  36. Tencor Alpha step 500 » Profilometry
  37. Varian Thermal Bell Jar Evaporator » Thin Film Deposition
  38. Wire Bonders » Wire Bonding
  39. Witec Alpha300R Confocal Raman Microscope » FTIR/Raman Spectroscopy
  40. X-ray photoelectron spectroscopy » XPS
Duke University - NC State University - UNC Chapel Hill - NCCU

Shared Materials Instrumentation Facility (SMIF)

  1. Bake Oven » Ovens
  2. DC Sputter System » Thin Film Deposition
  3. Digital Hot Plate » Synthesis and Fabrication
  4. Digital Instruments Scanning Probe Microscope » Scanning Probe Microscopy
  5. Dry Oxidation » Furnaces
  6. E-beam & Thermal Metal Evaporator » Thin Film Deposition
  7. E-Beam Lithography System » Lithography
  8. E-Beam Metal Evaporator » Thin Film Deposition
  9. Ellipsometer » Optical Spectrometry
  10. Film Thickness Measurement System » Optical Characterization
  11. Flip Chip Bonder » Wire Bonding
  12. Fluorescence Microscope with Camera » Optical Microscopy
  13. Frontside/Backside Mask Aligner » Lithography
  14. Glove Box » Microfabrication / Microelectronics / Clean Room
  15. High Temperature Anneal N-type doping » Furnaces
  16. Hydrogen anneal » Furnaces
  17. III-V Reactive Ion Etcher » Etching
  18. Kratos X-Ray Photoelectron Spectrometer » XPS
  19. LabRam Raman/PL Microscope » FTIR/Raman Spectroscopy
  20. Low Temp Anneal and High Temp Anneal for P-type doping » Furnaces
  21. Manual Microscope with Camera » Optical Microscopy
  22. Mask Aligner » Lithography
  23. Nicolet FT-IR Spectrometer » FTIR/Raman Spectroscopy
  24. Nomarski Microsope with Camera » Optical Microscopy
  25. Oxide/Nitride/Polymer Reactive Ion Etcher » Etching
  26. PDMS Oven » Ovens
  27. Plasma Asher » Etching
  28. Plasma Enhanced Chemical Vapor Deposition System » Thin Film Deposition
  29. Probe Station » Electron Microscopy
  30. Profilometer » Profilometry
  31. Rapid Thermal Anneal System » Furnaces
  32. RF Dielectric Sputter System » Thin Film Deposition
  33. SAXS/WAXS/GISAXS » Structural Characterization
  34. Silicon Deep Reactive Ion Etcher » Etching
  35. Vacuum Bake Oven » Ovens
  36. X-Ray Diffractometer » X-ray Diffraction
Johns Hopkins University
Massachusetts Institute of Technology
Northwestern University
Pennsylvania State University

Materials Characterization Lab

  1. AES-Physical Electronics 670; 50nm spatial resolution; in situ fracture stage » Atomic Content Characterization, Electron Microscopy, Structural Characterization, Spectroscopy, LEED/Auger Electron Spectroscopy
  2. AFM-Bruker Dimension Icon; contact mode, tapping mode, peakforce tapping, PFQNM, MFM, PRM, EFM, PFKPFM, and SCM » Electrical Characterization, Magnetic Characterization, Microscopy, Image Analysis and Processing, Scanning Probe Microscopy, Polymer Characterization
  3. AFM-Dimension 3100; contact mode, tapping mode, and phase imaging » Microscopy, Image Analysis and Processing, Scanning Probe Microscopy, Polymer Characterization
  4. Electrical Characterization-Impedance/Current/Resistance Measuremnets, PE and Strain, Breakdown, Poling Samples » Electrical Characterization
  5. ESEM-FEI Quanta 200 Environmental SEM; 10nm Resolution, BSE, EDS, and Temperature Control » Atomic Content Characterization, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Polymer Characterization, Structural Characterization
  6. FESEM-FEI NanoSEM 630; 1.7nm Resolution, BSE, EDS, Beam Deceleration » Atomic Content Characterization, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Polymer Characterization, Structural Characterization
  7. FIB-FEI Quanta 200 3D FIB; 3.5nm SEM Resolution, 10nm Ga+ Beam, Pt GIS, and Selective Carbon Etch GIS » Focused Ion Beam, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Structural Characterization
  8. FIB-FEI Helios NanoLab 660; DualBeam SEM/FIB Platform-pushing the limits of extreme high resolution characterization in 2D an 3D, nanoprototyping, and sample preparation » Focused Ion Beam, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Structural Characterization
  9. FTIR-Bruker Hyperion 3000 Microscope; Transmission, Specular Reflectance, ATR, and Relflection Absoprtion » Image Analysis and Processing, Polymer Characterization, Circular Dichrosim, Spectroscopy, FTIR/Raman Spectroscopy
  10. FTIR-Bruker IFS 66/S and Bruker Vertex V70; Near-IR/Mid-IR/Far-IR, Step Scan, Interchangeable Optical Components » Image Analysis and Processing, Polymer Characterization, Circular Dichrosim, Spectroscopy
  11. Nanoindentation-Hysitron TriboIndenter TI 900; <1nN Load Resolution, Load or Displacement Controlled Measurments » Microscopy, Image Analysis and Processing, Scanning Probe Microscopy
  12. Optical Profilometer-ZYGO NewView 7300; Surface Topography, Coating Thickness, Step Height, and 3D Imaging » Optical Characterization, Profilometry, Structural Characterization
  13. Particle Sizing-Malvern Mastersizer "S"; Laser Diffraction for Coatings, Ceramics, Cosemetics, Cement, Food, and Clays » Polymer Characterization, Structural Characterization
  14. Particle Sizing/Zeta Potential-Malvern Zetasizer ZS; Dynamic Light Scattering for Proteins, Polymers, Micelles, Carbohydrates, Nanoparticles, Colloidal Dispersions, and Emulsions » Polymer Characterization, Dynamic Light Scattering, Structural Characterization
  15. Raman-WITec Confocal Raman » Image Analysis and Processing, Optical Characterization, Polymer Characterization, Spectroscopy, FTIR/Raman Spectroscopy
  16. SAXS-Molecular Metrology SAXS » Polymer Characterization, Structural Characterization, X-ray Diffraction
  17. STEM-FEI Titan 3 G2; 0.7A Resolution, EDS, EELS, and EFTEM » Atomic Content Characterization, Microscopy, Electron Microscopy, STEM, Image Analysis and Processing
  18. STEM-JEOL 2010F; 2.0A Resolution, EDS, and EELS » Atomic Content Characterization, Microscopy, Electron Microscopy, STEM, Image Analysis and Processing
  19. Surface Area-Gemini 2360 Surface Area Analyer » Polymer Characterization, Structural Characterization
  20. Surface Area-Micromeritics ASAP 2020 » Polymer Characterization, Structural Characterization, Porosimetry
  21. Surface Area-Micromeritics ASAP 2920 » Polymer Characterization, Structural Characterization
  22. TEM-JEOL 2010; 2.3A Resolution, EDS, EELS and EFTEM » Atomic Content Characterization, Microscopy, Electron Microscopy, Transmission Electron Microscopy, Image Analysis and Processing
  23. TEM-Phillips 420; 3.4A Resolution with EDS » Atomic Content Characterization, Microscopy, Electron Microscopy, Transmission Electron Microscopy, Image Analysis and Processing
  24. TGA-MS-TGA Q50 with a Pfeiffer Vacuum Mass Spectrometer » Thermal Characterization, Thermo-Gravimetric Analysis
  25. UV-VIS-NIR-Perkin-Elmer Lambda 950 UV-VIS NIR Spectrophometer » Optical Characterization, Optical Spectrometry, Polymer Characterization, Spectroscopy
  26. XPS-Kratos Analytical Axiz Ultra » Atomic Content Characterization, Polymer Characterization, Structural Characterization, XPS
  27. XRD-Multiwire Laue; Back-Reflection Mode for Single Crystal Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
  28. XRD-PANalytical Empryean; Reflection Mode for Powder/Bulk Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
  29. XRD-PANalytical Xpert Pro MPD; Reflection Mode for Powder/Bulk/Thin Film Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
  30. XRD-Phillips MRD; Reflection Mode for Bulk and Thin Film Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
  31. XRD-Rigaku DMAX-Rapid II; Reflection or Transmission Mode for Powder/Bulk/Thin Film/Single Crystal Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
Princeton University

Imaging and Analysis Center

  1. Allied Multi Prep Polisher
  2. AmScope Stereo Microscopes » Optical Microscopy
  3. Anton Paar MCR501 Rheometer » Thermal Characterization
  4. Anton Paar MCR502 Rheo-Confocal System » Thermal Characterization
  5. Anton Paar MCR702 Rheometer » Thermal Characterization
  6. Bruker D8 Advance XRD » X-ray Diffraction
  7. Bruker D8 Discover X-Ray Diffractometer » X-ray Diffraction
  8. Bruker Dimension ICON3 AFM » Scanning Probe Microscopy
  9. Bruker Multimode AFM » Atomic Force Microscopy
  10. Bruker NanoMan AFM Dimension 3000 AFM » Atomic Force Microscopy
  11. Computer Cluster » Computing / Simulation
  12. CreaTec LT-HV nc-AFM/STM » Scanning Probe Microscopy
  13. Cressington Carbon Coater » Image Analysis and Processing
  14. Diamond Knives » Image Analysis and Processing
  15. Differential Scanning Calorimeter 8500 (DSC) » Calorimetry
  16. Dimpler » Image Analysis and Processing
  17. Dynamic Mechanical Analysis 8000 (DMA) » Thermal Characterization
  18. Evactron Plasma Cleaner » Image Analysis and Processing
  19. FEI CM100 TEM » Transmission Electron Microscopy
  20. FEI CM200 FEG-TEM with EDS/EELS » Transmission Electron Microscopy
  21. FEI Helios G3 DualBeam FIB/SEM with EDS » Focused Ion Beam
  22. FEI Quanta 200 FEG Environmental-SEM with EDS/EEL » SEM
  23. FEI StrataTM DB 235 FIB » Focused Ion Beam
  24. FEI Verios 460 XHR SEM with EDS » SEM
  25. FEI Vitrobot Units » Image Analysis and Processing
  26. FEI XL30 FEG-SEM » SEM
  27. Fischione 1010 dual-beam Ion Mill » Image Analysis and Processing
  28. Fischione NanoClean Station » Image Analysis and Processing
  29. FLS980 Steady State, Phosphorescence/Flourescence Lifetime Spectrometer » Spectroscopy
  30. Glass Knife Maker » Image Analysis and Processing
  31. Horiba Raman Spectrometer
  32. Isitemp Oven » Image Analysis and Processing
  33. Keithley 4200-SCS Semiconductor Characterization System » Thermal Characterization
  34. Keyence VK-X1000 Confocal Microscope » Optical Microscopy
  35. Leica Confocal DCM 3D
  36. Leica Sputter Coater » Image Analysis and Processing
  37. Leica Ultracut UCT Ultramicrotome Instrument
  38. Low-speed Diamond Saw » Image Analysis and Processing
  39. Nicolet iN10 MX FTIR » Spectroscopy
  40. Optical Microscope w/CCD Camera » Image Analysis and Processing
  41. Plasma Cleaner » Image Analysis and Processing
  42. Reichert-Jung Ultracut E Microtome » Image Analysis and Processing
  43. Rigaku MiniFlex XRD » X-ray Diffraction
  44. Spectrometer (TGA-GC/MS) » Thermal Characterization
  45. Talos F200X S/TEM with SuperX-EDS » Transmission Electron Microscopy
  46. TEM sample cutter » Image Analysis and Processing
  47. Thermo K-alpha X-ray Photoelectron Spectrometer (XPS/UPS) » Spectroscopy
  48. Thermogravimetric Analyzer coupled to Clarus 680 SQ 8T Gas Chromatograph Mass » Thermo-Gravimetric Analysis
  49. Tital Themis 80-300 Cubed Double Cs-corrected S/TEM with EDS » Transmission Electron Microscopy
  50. Titan Krios G3 300 cryo-TEM » Transmission Electron Microscopy
  51. Ultrasonic Cutter » Image Analysis and Processing
  52. UV-VIS Cary 5000 Spectrometer » Spectroscopy
  53. VCR IBS/TM 200S Ion Bean Sputterer » Image Analysis and Processing
  54. Woollam M-2000 Ellipsometer
  55. Zeiss Axios Scope A1 Transmission, Reflection, Polarizing Microscope » Optical Microscopy
  56. Zeiss Discovery V12 Stereomicroscope » Optical Microscopy
  57. Zeiss Xradias Versa 520 3D X-ray microscope » X-ray Diffraction
University of California at Santa Barbara
University of Chicago

Materials Preparation and Measurement Laboratory (MPML)

  1. Agilent 8453 UV/VIS Spectrophotometer » Optical Spectrometry
  2. Agilent Cary 5000 UV/VIS/NIR Spectrophotometer » Optical Spectrometry
  3. Asylum Cypher ES AFM » Atomic Force Microscopy
  4. Asylum MFP-3D-BIO AFM » Atomic Force Microscopy
  5. Bruker Multimode 5 AFM with Nanoscope IIIa Controller » Atomic Force Microscopy
  6. Bruker Multimode 8 AFM with Nanoscope V Controller » Atomic Force Microscopy
  7. Bruker Standalone STM with Nanoscope IIIa Controller » Scanning Tunneling Microscopy
  8. Buehler ECOMET 3 » Synthesis and Fabrication
  9. Carl Zeiss Merlin SEM » Electron Microscopy, SEM
  10. FEI Nova NanoSEM 230 » SEM
  11. Gaertner Stokes WAFERSKAN Ellipsometer » Ellipsometry
  12. Hitachi S-2700 » SEM
  13. HJY Fluorolog-3 Spectrofluorometer » Optical Spectrometry
  14. Kulicke & Soffa 4526 Wire Bonder » Wire Bonding
  15. LabRamHR Evolution Confocal Raman Microscope » Microscopy, Optical Microscopy, FTIR/Raman Spectroscopy
  16. Low Speed Diamond Wheel Saw
  17. Malvern Zetasizer Nano ZS » Dynamic Light Scattering
  18. MINIMET 1000 Grinder-Polisher » Synthesis and Fabrication
  19. Optical Microscope » Optical Microscopy
  20. Plasma Etch PS-100LF » Etching
  21. Quartz Tube Furnaces » Furnaces
  22. South Bay Technology RIE-2000
  23. Specialty Coating Systems Spincoater P6700 » Lithography
  24. TA Instruments SDT Q600 DSC/TGA » Calorimetry, Thermo-Gravimetric Analysis
  25. Ted Pella Sputter Coater » Thin Film Processing and Deposition
  26. ULS VLS4.60 Laser Cutter » Synthesis and Fabrication
  27. UV Exposure System » Lithography
  28. V&N E-Gun Evaporator » Thin Film Deposition
University of Massachusetts Amherst
University of Minnesota

Characterization Facility (CharFac)

  1. 2 meter – 2D Area Detector » X-ray Diffraction
  2. 6 meter - 2D Area Detector » X-ray Diffraction
  3. Agilent 5500 environmental SPM plus high-speed force-curve mapping and multifrequency methods » Scanning Probe Microscopy
  4. Agilent 5500 environmental SPM plus inverted light microscope » Scanning Probe Microscopy
  5. Auger Electron Spectroscopy » LEED/Auger Electron Spectroscopy
  6. Bruker Nanoscope V Multimode 8 with QNM » Scanning Probe Microscopy
  7. Bruker-AXS Microdiffractometer » X-ray Diffraction
  8. Cold Field Emission Gun Scanning Electron Microscope » SEM
  9. Confocal Raman Microscope » FTIR/Raman Spectroscopy
  10. Diffractometer » X-ray Diffraction
  11. Diffractometer » X-ray Diffraction
  12. FEI Tecnai G2 F30
  13. Field Emission Gun Cryo Transmission Electron Microscope » Transmission Electron Microscopy
  14. Field Emission Gun Scanning Electron Microscope
  15. Field Emission Gun Scanning Electron Microscope » SEM
  16. Field Emission Gun Transmission Electron Microscope » Transmission Electron Microscopy
  17. Fourier-Transform Infrared Spectrometer (FTIR) » FTIR/Raman Spectroscopy
  18. Ion Beam Analysis » Focused Ion Beam
  19. Microdiffractometer » X-ray Diffraction
  20. micromechanical tester
  21. Microscopic Contact Angle Meter
  22. NanoIndenter
  23. Nanoscope V Multimode 8 » Atomic Force Microscopy
  24. Panalytical X'Pert Pro » X-ray Diffraction
  25. Spectroscopic Ellipsometer
  26. Tencor P10 Profilometer
  27. Theta-Theta Diffractometer » X-ray Diffraction
  28. Transmission Electron Microscope » Transmission Electron Microscopy
  29. Transmission Electron Microscope » Transmission Electron Microscopy
  30. Transmission Electron Microscope » Transmission Electron Microscopy
  31. Transmission Electron Microscope » Transmission Electron Microscopy
  32. Triboindenter
  33. Video-Enhanced Microscope (VEM)
  34. X-Ray Diffractometer » X-ray Diffraction
  35. X-Ray Diffractometer » X-ray Diffraction
  36. X-ray Photoelectron Spectroscopy (ESCA)
  37. X-ray Photoelectron Spectroscopy (ESCA)
University of Pennsylvania
University of Utah
University of Wisconsin-Madison

The Materials Science Center at the University of Wisconsin-Madison

  1. PANalytical X'Pert PRO X-Ray Diffractometer (XRD) » X-ray Diffraction
  2. Bruker Bioscope Catalyst Atomic Force Microscope (AFM, Bio-AFM, Scanning Probe Microscope (SPM)) » Optical Microscopy, Scanning Probe Microscopy, Atomic Force Microscopy
  3. Bruker D8 Discover Diffractometer X-Ray Diffractometer (XRD) » X-ray Diffraction
  4. Cameca (Imago) Local Electrode Atom Probe (LEAP) » Atom probe
  5. Confocal Laser Scanning Microscope (LSM) » Image Analysis and Processing, Optical Microscopy, Optical Characterization, Optical Spectrometry
  6. CryoUltraMicrotome
  7. Digital Instruments Atomic Force Microscope (AFM, SPM) » Atomic Content Characterization, Scanning Probe Microscopy, Atomic Force Microscopy, Profilometry
  8. FEI Titan Aberration-corrected (S)TEM » Microscopy, Electron Microscopy, Transmission Electron Microscopy, STEM
  9. FEI Vitrobot
  10. FESEM/EDS
  11. FESEM/EDS/EBSD
  12. Focussed Ion Beam FIB/FESEM
  13. Horiba Jvon-Yobin Aramis Confocal Raman Microscope » Image Analysis and Processing, Optical Microscopy, Confocal Fluorescence Microscopy, Optical Characterization, Optical Spectrometry, FTIR/Raman Spectroscopy
  14. Hysitron TI950 Triboindenter » Mass/Density Characterization, Structural Characterization
  15. Mirco FT-IR Spectrometer
  16. NanoMill
  17. PANalytical Empyrean X-ray diffractometer » X-ray Diffraction
  18. Small-angle X-ray Scattering System XRD » X-ray Diffraction
  19. Tecnai Cryo Transmission Electronc Microscope (TEM) » Microscopy, Electron Microscopy, Transmission Electron Microscopy, STEM, Image Analysis and Processing
  20. Tecnai TF-30 300KV Field Emission Scanning Transmission Electron Microscope (FE STEM) » Electron Microscopy, Transmission Electron Microscopy, STEM
  21. ThermoFisher Helios G4 UX Plasma Focused Ion Beam/Field Emission Scanning Electron Microscope » Focused Ion Beam
  22. Ultra Twin TEM
  23. X-ray Photoelectron Spectrometer (XPS) » XPS
  24. ZYGO Optical Profilometer » Optical Microscopy, Optical Characterization, Profilometry, Structural Characterization

The Wisconsin Center for Applied Microelectronics (WCAM)

  1. Four-Point Probe
  2. Aligner for EV 801 Bonder
  3. Aluminum Wedge Bonder
  4. Anneal Oven
  5. Anneal Oven
  6. Automegasamdri 915B Critical Point Dryer
  7. Buffered Oxide Etch Chemical Bench
  8. Chemical Bench
  9. Chemical Bench ("DAE Bench")
  10. Chemical bench (Prefurnace Clean)
  11. Chemical bench for teaching
  12. Chemical bench for teaching
  13. Contact Aligner / IR Back Side Aligner
  14. Contact Aligner / IR Back Side Aligner
  15. Contact Aligner, 3" wafers;
  16. Contact Aligners for 4-inch Wafers
  17. DC Sputterer
  18. Dicing Saws
  19. Die Attacher
  20. E-beam Evaporator
  21. E-Beam Evaporator
  22. E-beam Evaporator
  23. Elionix ELS-G100 Electron Beam Lithography System » Lithography
  24. Film Stress Measurement
  25. Filmetrics
  26. Forming Gas Metal Anneal Furnace
  27. Furnace Tube 1
  28. Furnace Tube 3
  29. Furnace Tube 4
  30. Furnace Tube 6
  31. General-Use Steam Oxidation Furnace Tube 2
  32. Gold Ball Bonder
  33. high-density plasma RIE
  34. III-V Semiconductor Chemical Bench
  35. Indium Evaporator
  36. Lithography Ovens
  37. Low-Temperature Oxide Furnace
  38. Metal Etcher
  39. Non-Litho Spinner
  40. Obducat AB Nano Imprint Lithography system - Nanoimprinter » Microfabrication / Microelectronics / Clean Room, Lithography
  41. Optical microscope with Camera and PC
  42. Optical microscope with Camera and PC
  43. Photoresist spincoater for teaching
  44. Piranha Bench
  45. PLA-501 Contact Aligner;
  46. Plasma Asher & Stripper
  47. PlasmaTherm
  48. Polysilicon LPCVD Furnace
  49. Probe Station
  50. Programmable Photoresist Spinner #2 - SU8
  51. Programmable Photoresist Spinners #1 and #3 - General Use
  52. Programmable Polymer Oven
  53. Programmable Polymer Oven
  54. Projection Litho Exposure Stepper
  55. Rapid Thermal Annealer
  56. Reactive-Ion Etcher
  57. RF/DC Sputterer
  58. Silicon Deep RIE
  59. Silicon Wet Etch Bench
  60. Solvent Bench
  61. Solvent Benches
  62. Spin-Rinse Dryer
  63. Spin-Rinse Dryer
  64. Spin-Rinse Dryer
  65. Spin-Rinse Dryer (SRD)
  66. SU8 Solvent Bench
  67. Surface Profilometer (2 units)
  68. Thermal Anneal Furnace for Metals ("Aluminum Anneal Tube")
  69. Unaxis 790 RIE
  70. UV-Ozone Stripper/Cleaner
  71. Wafer Bonder
  72. Wafer Scribe
  73. Wet/Dry Oxidation Furnace
  74. Wet/Dry Oxidation Furnace for teaching
  75. Wet/Dry Oxidation Furnace for teaching
  76. Wet/Dry Oxidation Furnace for teaching
  77. Wet/Dry Oxidation Tube, Classroom Bay
Yale University