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Biologial Materials Facility

1. ÄKTA Pure liquid chromatography system » Gel Permeation Chromatography
2. ALV/DLS/SLS-5000 Light Scattering System » Dynamic Light Scattering
3. Cold room bench space » Synthesis and Fabrication
4. High-capacity and high-speed centrifuges » Synthesis and Fabrication
5. Stationary, shaking, and bioreactor type incubators » Synthesis and Fabrication

Computation Facility

1. Science-wide high performance computational cluster (HPCC) » Computing / Simulation

Light Microscopy Facility

1. Multi wavelength TIRF microscope » Electron Microscopy

Microfabrication Facility

1. Contact mask alignment and photoresist exposure system » Structural Characterization

Central Facility for Electron Microscopy

1. FEI Helios Dual Beam FIB with an Omniprobe nanomanipulator and autoTEM sample preparation » Focused Ion Beam
2. JEOL JEM-2010 TEM » Transmission Electron Microscopy
3. JEOL JSM 845 SEM » SEM
4. LEO 1530 HRSEM » SEM
5. Phillips EM-420 TEM/STEM » Transmission Electron Microscopy

Central Facility for Microelectronics

1. PlasmaTherm RIE/PECVD System » Thin Film Deposition
2. Annealing Furnace » Furnaces
3. Cary 500 Spectrophotometer » Optical Spectrometry
4. Cee Model 100 Photoresist Spinner » Lithography
5. Dektak Profilometer » Profilometry
6. Dopant Furnace » Furnaces
7. Electron Beam Evaporator » Thin Film Deposition
8. HVEC Thermal Evaporator » Thin Film Deposition
9. Karl Suss MJB-3 Mask Aligner » Lithography
10. LPCVD (Low-pressure Chemical Vapor Deposition) » Thin Film Deposition
11. Oxford Instruments Ion-beam Deposition Tool » Thin Film Deposition
12. Plasma Etching - Trion (Chlorine-chemistry) RIE Tools » Etching
13. Plasmatherm RIE/PECVD System (Fluorine-chemistry) » Etching
14. Rudolph Ellipsometer » Thin Film Deposition
15. Three-target Magnetron Sputtering System » Thin Film Deposition
16. Wedge Bonder » Wire Bonding
17. Wet and Dry Oxide Furnace » Furnaces
18. Wet Chemistry Hoods » Lithography

Orientation Imaging Microscopy (OIM)

1. FEI Quanta 200 Field Emission Environmental SEM » SEM
2. Nova 600 NovaLab Dual Beam Focused Ion Beam SEM » SEM
3. Philips XL40 FEGSEM » SEM

Scanning Auger Electron Microscopy Laboratory

1. PHI Model 600 SAM » Spectroscopy

Surface Preparation and Characterization Laboratory

1. Diamond Milling System
2. Logitec Lapping and Polishing System » Thin Film Processing and Deposition
3. Spindle Polishing Machine
4. ThermoMicroscopes M5 » Optical Microscopy, Atomic Force Microscopy

Atom Probe Tomography Laboratory

1. Cameca LEAP 4000 XSi » Atom probe
2. Dynamic Atom Probe » Atom probe

Characterization Laboratory

1. IV16L Solar Simulator » Solar Simulator
2. Tescan S8252G Raman - SEM/FIB » Focused Ion Beam, SEM, FTIR/Raman Spectroscopy

Chemical Vapor Deposition Laboratory

1. PECVD Cluster Tool » PECVD
2. Si Nanoparticle Reactor

Cleanroom and Processing Laboratory

1. Denton Thermal Evaporation Chamber » Thin Film Deposition
2. Four-Point Probe » Thin Film Deposition
3. Gaertner Ellipsometer » Thin Film Deposition
4. Lindberg/Blue Oven » Furnaces
5. March Reactive Ion Etcher » Etching
6. Probe Station
7. SCS G3P-8 Spin Coater » Thin Film Deposition
8. ULVAC-RIKO MILA-5000 Rapid Thermal Processor » Furnaces

Synthesis Laboratory

1. Glove Box » Microfabrication / Microelectronics / Clean Room

Thin Film Processing Lab

1. AJA Evaporation Chamber » Thin Film Deposition
2. AJA Orion Sputter Chamber » Thin Film Deposition
3. Cary 5G Spectrophotometer » Spectroscopy
4. Glass Cutting Board » Microfabrication / Microelectronics / Clean Room
5. Jelight Model 42 UVO-Cleaner » Microfabrication / Microelectronics / Clean Room
6. Mellen S5-211-3 Tube Furnace » Furnaces
7. Nicolet 6700 FT-IR Spectrometer » Spectroscopy
8. Semicore Reactive Ion Etcher
9. Semicore Sputter System » Thin Film Deposition
10. Sentech SENDIRA FT-IR Ellipsometer » Thin Film Deposition
11. Tencor P10 Profilometer
12. Wet Chemical Etching

Electron Microscopy

1. Carl Zeiss Zigma VP FE SEM » SEM
2. FEI Talos F200X Transmission/Scanning Transmission Electron Microscope (S/TEM) » Transmission Electron Microscopy, STEM
3. Light Zeiss Axioscope A1 » Optical Microscopy
4. Nova Nano FE SEM 450 with a NPGS » SEM

Shared Materials Characterization Laboratory (SMCL)

1. Agilent 8453 UV/Vis Spectrophotometer » Optical Spectrometry
2. Agilent SuperNova SCXRD » X-ray Diffraction
3. Bruker Dimension AFM » Atomic Force Microscopy
4. Cryogenic R-700X SQUID Magnetometer » SQUID Magnetometry
5. Glove box 2D materials stacking station » Synthesis and Fabrication
6. Malvern Zetasizer Nano-ZS » Dynamic Light Scattering
7. PANalytical XPert3 Powder XRD » X-ray Diffraction
8. Phi 5500, XPS » XPS
9. Renishaw inVia micro-Raman spectrometer » FTIR/Raman Spectroscopy
10. TA Instruments Q500 TGA » Thermo-Gravimetric Analysis
11. Woollam Alpha-SE Ellipsometer » Ellipsometry

Electron Microscopy Cluster

1. Allied Multiprep polishers » Electron Microscopy
2. Electron Backscatter Detector » SEM
3. FEI Strata 400 STEM FIB » Focused Ion Beam, STEM
4. FEI Tecnai 12 Bio-Twin TEM » Transmission Electron Microscopy
5. FEI Titan Cryo-S/TEM 300kV » Electron Microscopy, Transmission Electron Microscopy, STEM
6. Fischione 1010 Ion mill » Electron Microscopy
7. Leica EM UC7/FC7 Cryoultramicrotome » Electron Microscopy
8. Leica Ultracut UCT Ultramicrotome » Electron Microscopy
9. Olympus BX51 W1F » Optical Microscopy
10. Olympus BX51 with crossed polarization » Optical Microscopy
11. Tescan Mira3 FESEM » SEM
12. Thermo Fisher Arctica 200kV S/TEM » Transmission Electron Microscopy, STEM
13. Thermo Fisher Helios G4 UX Focused Ion Beam » Focused Ion Beam
14. Thermo Fisher Perseus 60-300kV S/TEM » Transmission Electron Microscopy, STEM
15. Thermo Fisher Spectra 300 30-300kV Kraken & Andromeda STEMs » Transmission Electron Microscopy, STEM
16. Zeiss Gemini 500 SEM » SEM
17. Zeiss Sigma 500 SEM » SEM

Materials Cluster

1. 3i Marianas Spinning Disk Confocal Microscope » Optical Microscopy, Confocal Fluorescence Microscopy
2. Air Furnaces » Furnaces
3. Asylum-MFP3D-Bio-AFM-SPM » Electrical Characterization, Magnetic Characterization, Optical Microscopy, Atomic Force Microscopy
4. ATM Sonic sifter » Thermal Characterization
5. Bruker D8 Advance ECO Powder Diffractometer » X-ray Diffraction
6. Bruker General Area Detector Diffraction System (GADDS) » X-ray Diffraction
7. Bruker Hyperion FT-IR Spectrometer & Microscope » Microscopy, Optical Microscopy, Polymer Characterization, Spectroscopy, FTIR/Raman Spectroscopy
8. Bruker Vertex V80V Vacuum FTIR system » Optical Spectrometry, FTIR/Raman Spectroscopy
9. Carver 25 ton press » Microscopy
10. Cary 5000 UV-Vis-NIR Spectrophotometer » Optical Spectrometry
11. Cascade Four-Point Probe » Electrical Characterization
12. Controlled Atmosphere Furnaces » Furnaces
13. Edinburgh FLS1000 Lifetime Fluorescence Spectrometer » Optical Microscopy, Confocal Fluorescence Microscopy, Optical Characterization, Optical Spectrometry
14. Glass Bead Abrasive Units (sand blasting) » Synthesis and Fabrication
15. High Vacuum Furnaces » Furnaces
16. Inert Gas Glove Boxes » Synthesis and Fabrication
17. JAI-LC9110NEXT-Recycling-Preparative-HPLC » Gel Permeation Chromatography
18. Jasco 1500 Circular Dichroism Spectrometer » Circular Dichrosim
19. Keyence VK-X260 Laser-Scanning Confocal Microscope » Profilometry
20. KJL Magnetron Sputtering Tool » Thin Film Deposition
21. KSV-NIMA-KN2002-Langmuir-Blodgett-Trough » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition
22. KSV-NIMA-KN4010-Dip-Coater » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition
23. Laurell-WS-400A-Spin-Coater » Thin Film Deposition, Polymer Processing
24. Multiwire Back-Reflection Laue Detector » X-ray Diffraction
25. PPMS Physical Property Measurement Systems » PPMS, Magnetic Characterization, Thermal Characterization
26. Quantum Design MPMS3 SQUID Magnetometer » SQUID Magnetometry
27. Recycling Preparative GPC » Polymer Characterization
28. Renishaw InVia Confocal Raman microscope » Microscopy, Optical Microscopy, Confocal Fluorescence Microscopy, Spectroscopy, FTIR/Raman Spectroscopy
29. Rigaku SmartLab X-Ray Diffractometer » X-ray Diffraction
30. Sputtering Deposition System » Thin Film Deposition
31. Stationary Spot Welder (Hughes HRW250B) » Synthesis and Fabrication
32. Struers Rotopol » STEM
33. TA Instruments DHR3 Rheometer » Polymer Characterization, Structural Characterization, Dynamical Mechanical Analysis, Rheometry
34. TA Instruments DMA Q800 Dynamic Mechanical Thermal Analysis (DMTA) » Polymer Characterization, Structural Characterization, Dynamical Mechanical Analysis
35. TA Instruments Q1000 Modulated Differential Scanning Calorimeter (MDSC) » Calorimetry
36. TA Instruments Q400EM Thermomechanical Analysis (TMA) » Polymer Characterization
37. TA Instruments Q500 Thermogravimetric Analyzer (TGA) » Thermo-Gravimetric Analysis
38. Tencor Alpha step 500 » Profilometry
39. ThermoFisher Capillary Breakup Extensional Rheometer (CaBER) » Polymer Characterization, Dynamical Mechanical Analysis
40. Varian Thermal Bell Jar Evaporator » Thin Film Deposition
41. Waters Ambient-Temperature GPC » Polymer Processing
42. Waters Ambient-Temperature-Aqueous GPC » Gel Permeation Chromatography
43. Waters Breeze DMSO GPC » Gel Permeation Chromatography
44. Waters MALDI Micro MX (MALDI-TOF) » Polymer Characterization
45. Wire Bonders » Wire Bonding
46. Witec Alpha300R Confocal Raman Microscope » FTIR/Raman Spectroscopy
47. X-ray photoelectron spectroscopy. Scienta Omicron ESCA2SR, SSX-100 » XPS

Analytical Instrumentation Facility (AIF)

1. Bruker Dimension 3000 and MultiMode
2. FEI Quanta 3D FEG
3. FEI Titan 80-300
4. FEI Verios extreme-resolution SEM » Electron Microscopy
5. Hitachi S3200N
6. Hysitron Ubi-1 Nanoidenter » Scanning Probe Microscopy
7. ION TOF TOF-SIMS 5
8. JEOL 2000FX
9. JEOL 2010F
10. Leica UC7
11. Panalytical Empyrean
12. PECS System with PHOIBOS 150 Analyzer
13. Rigaku Smartlab XRD

Center for Biomanufacturing Research Institute & Technology Enterprise (BRITE)

1. Q-TOF Mass Spectrometer
2. 500 MHz NMR Varian Unity INOVA
3. LC/MS (multiple units) Agilent 1200
4. Raman / AFM System » Scanning Probe Microscopy

Chapel Hill Analytical and Nanofabrication Laboratory (CHANL)

1. DRIE (Alcatel AMS)
2. Electron Beam Evaporator
3. ESEM
4. FIB (FEI Helios 600 Nanolab Dual Beam System)
5. Hot Embosser (JenOptik HX03)
6. Laser Ablation
7. Mask Aligner
8. Metal Sputtering
9. Oxygen Plasma System
10. PECVD
11. PLD (PVD Products Nano-PLD-1000 Pulsed Laser Deposition System)
12. SEM (Hitachi S-4700 Cold Cathode Field Emission Scanning Electron Microscope)
13. Stylus Profiler: KLA Tencor P-6
14. Thin-Film Mapper: Filmetrics F50
15. Ultramicrotome

Computer Integrated Systems for Microscopy and Manipulation (CISMM)

1. 3DFM (3D Force Microscope)
2. MHTS (Magnetic High Throughput System)
3. NanoManipulator

Nanofabrication Facility (NNF)

1. Alcatel AMS 100
2. ASML 193 nm PAS 5500 950B Step and Scan System
3. DC Sputtering System
4. GCA 8500DSW Stepper
5. Headway Spinner: Photoresist Spinner
6. Karl Suss MJB3 Mask Aligner &Karl Suss MA 6 Mask Aligner
7. Kurt Lesker Electron Beam Evaporation System & 4" (Old) Electron Beam Evaporation System
8. Laurell Spinner: Photoresist Spinner
9. LPCVD
10. Nano eNabler
11. Nanometrics Nanospec/AFT
12. Obducat NIL-2.5 Nanoimprinter
13. Plasma Therm
14. PM-600: Plasma Asher
15. RAITH 150 TWO E-BEAM WRITER
16. Resistive Heated Evaporation
17. RF Magnetron Sputtering
18. Semi Group RIE
19. Solarex
20. SVG 90-SE develop track
21. Trion
22. UHV-RTCVD System
23. Veeco Dektak 150 Profilometer
24. Woollam VASE (Variable Angle Spectroscopic Ellipsometer)

Shared Materials Instrumentation Facility (SMIF)

1. Bake Oven » Ovens
2. DC Sputter System » Thin Film Deposition
3. Digital Hot Plate » Synthesis and Fabrication
4. Digital Instruments Scanning Probe Microscope » Scanning Probe Microscopy
5. Dry Oxidation » Furnaces
6. E-beam & Thermal Metal Evaporator » Thin Film Deposition
7. E-Beam Lithography System » Lithography
8. E-Beam Metal Evaporator » Thin Film Deposition
9. Ellipsometer » Optical Spectrometry
10. Film Thickness Measurement System » Optical Characterization
11. Flip Chip Bonder » Wire Bonding
12. Fluorescence Microscope with Camera » Optical Microscopy
13. Frontside/Backside Mask Aligner » Lithography
14. Glove Box » Microfabrication / Microelectronics / Clean Room
15. High Temperature Anneal N-type doping » Furnaces
16. Hydrogen anneal » Furnaces
17. III-V Reactive Ion Etcher » Etching
18. Kratos X-Ray Photoelectron Spectrometer » XPS
19. LabRam Raman/PL Microscope » FTIR/Raman Spectroscopy
20. Low Temp Anneal and High Temp Anneal for P-type doping » Furnaces
21. Manual Microscope with Camera » Optical Microscopy
22. Mask Aligner » Lithography
23. Nicolet FT-IR Spectrometer » FTIR/Raman Spectroscopy
24. Nomarski Microsope with Camera » Optical Microscopy
25. Oxide/Nitride/Polymer Reactive Ion Etcher » Etching
26. PDMS Oven » Ovens
27. Plasma Asher » Etching
28. Plasma Enhanced Chemical Vapor Deposition System » Thin Film Deposition
29. Probe Station » Electron Microscopy
30. Profilometer » Profilometry
31. Rapid Thermal Anneal System » Furnaces
32. RF Dielectric Sputter System » Thin Film Deposition
33. SAXS/WAXS/GISAXS » Structural Characterization
34. Silicon Deep Reactive Ion Etcher » Etching
35. Vacuum Bake Oven » Ovens
36. X-Ray Diffractometer » X-ray Diffraction

Small Molecule Synthesis Facility (SMSF)

1. Agilent 1200 (prep HPLC)
2. Agilent 1200/6310
3. CEM Explorer
4. Teledyne/Isco CombiFlash Rf (purification system)

Triangle MRSEC Soft Matter Lab

1. ARES-G2 Rheometer » Polymer Characterization
2. Asylum Research Molecular Force Probe 3D atomic force microscope » Microscopy
3. Atomic absorption spectrometer
4. Biacore X
5. Cary 300 UV-Vis spectrometer » Spectroscopy
6. Cary-Varian 6000i UV-VIS-IR spectrometer
7. Electric Characterization » Electrical Characterization
8. Fisher Scientific Sonic Dismembrator
9. Gatan Tensile Stages » SEM
10. HunterLab UltraScan Vis
11. IBM Blade Center Linux cluster » Computing / Simulation
12. Instron » Polymer Characterization
13. Interferometric lithography » Synthesis and Fabrication
14. Izon Q Nano particle analyzer
15. Meiji Techno Metallurgical Microscope System » Microscopy
16. New Brunswick Excella E25 shaker-incubator
17. Olympus BXiS Upright Microscope » Microscopy
18. Plasma Cleaner
19. Sorvall centrifuge RC 3B plus
20. Sorvall centrifuge RC 5B plus
21. Sorvall centrifuge RC 5C plus
22. TA Instruments Nano-DSC differential scanning calorimeter » Thermal Characterization
23. ThermoScientific Artic thermocycler
24. UVP Gel max imager
25. Wire Exploder

Physics NanoFab Facility

1. Horiba Jobinyvon Ellipsometer
2. Raman System
3. UHV Characterization & Growth System » Spectroscopy

Electron Microscopy Facilities

1. 300 keV HRTEM with FEG and GI » Transmission Electron Microscopy
2. Amray 1860 FEG high resolution SEM » SEM
3. JEOL 6700F Scanning Electron Microscope » SEM
4. JEOL 8600 Electron Microprobe » Electron Microscopy
5. Philips 420T TEM » Transmission Electron Microscopy
6. Zeiss SEM and Electron Beam Lithography System » SEM

Fabrication and Processing

1. Class 1000 Cleanroom » Microfabrication / Microelectronics / Clean Room
2. Dual-Source Thermal Evaporators
3. Electron-Beam Lithography » Lithography
4. FEI Nova 600 Dual-Beam Focused Ion Beam System » Focused Ion Beam
5. Irraditation Chamber for Nuclear Particle Tracks
6. Kulicke & Soffa 4523 Wire Bonder » Wire Bonding
7. Lambda-Physik Pulsed Laser Deposition System » Pulsed Laser Deposition
8. Lindberg/Blue Tri-Arc Furnace » Furnaces
9. Mask Aligner » Lithography
10. Multilayer Electrochemical Deposition System » Thin Film Processing and Deposition
11. Multiple-Source Supttering Chambers » Thin Film Deposition
12. Projection Photolithography » Lithography
13. Tubular Furnaces (up to 1500 C) » Furnaces

Measurement of Physical Properties

1. Andreev Reflection Spectroscopy » Spectroscopy
2. Anton Paar MHT4 Ultramicrohardness System
3. Magneto-Transport Measurement System » Magnetic Characterization
4. Nanoindenter XP-Mechanical Properties Microprobe
5. Oxford 200 Top-Loading Dilution Refrigerator with 9 T Magnet » Magnetic Characterization
6. Perkin Elmer DSC2 and DSC7 Calorimeters » Calorimetry
7. Quantum Design MPMS SQUID Magnetometer » SQUID Magnetometry
8. RMC Helium-3 Cryostat
9. Shimadzu UV-2101 UV-VIS Spectrometer » Spectroscopy
10. Vector Vibrating Sample Magnetometer » Magnetic Characterization

Surface Characterization Facilities

1. AFM/MFM » Atomic Force Microscopy
2. Molecular Image Picoscan AFM » Atomic Force Microscopy
3. STM Tip Etching and Coating » Scanning Tunneling Microscopy
4. Tencor Thin Film Profilometer » Profilometry
5. Topometrix Discoverer STM and AFM » Scanning Probe Microscopy
6. X-Ray Photoelectron Spectrometer

X-Ray Characterization

1. Philips 3720 X-Ray Diffraction System » X-ray Diffraction
2. Philips X'Pert MRD Diffractometer
3. X-Ray Photoelectron Spectrometer » XPS

Electron Microscopy SEF

1. FEI Tecnai Multipurpose TEM
2. FEI/Philips XL30 FEG ESEM
3. Helios Nanolab 600 Dual Beam Focused Ion Beam Milling System (FIB)
4. JEOL 2010 Advanced High Performance TEM
5. JEOL 2010 FEG Analytical Electron Microscope
6. JEOL 2011 High Contrast Digital TEM
7. JEOL 5910 General Purpose SEM
8. Zeiss Merlin High-resolution SEM

Materials Analysis SEF

1. Cary 500i UV-Vis-NIR Dual-Beam Spectrophotometer
2. Filmetrics Reflectometer
3. Gaertner Scientific 3 Wavelength Variable Angle Ellipsometer
4. Harrick Scientific PDC-32G Plasma Cleaner
5. Kaiser Optical Hololab 5000R Raman Microscope
6. Linkum Scientific FTIR 600 Freezing/Hot stage
7. Mettler FP900 Thermosystem Hot stage
8. Oriel Instaspec II UV-Vis Spectrograph with Photo Diode Array Detector
9. Oxford Instruments Liquid Helium Cryostat
10. Perkin Elmer Pyris 1 Differential Scanning Calorimeter
11. Physical Electronics Model 700 Scanning Auger Nanoprobe
12. Physical Electronics Versaprobe II X-ray Photoelectron Spectrometer
13. Sopra Spectroscopic Ellipsometer
14. Tencor FLX 2320 Thin Film Stress Measurement System
15. Tencor P-16 Surface Profilometer
16. Thermo Fisher Continuum Fourier Transform Infrared Microscope
17. Thermo Fisher FTIR6700 Fourier Transform Infrared Spectrometer
18. Veeco Metrology Nanoscope IV Scanned Probe Microscope Controller with Dimension 3100 SPM
19. Veeco Metrology Nanoscope V Scanned Probe Microscope Controller with Dimension 3100 SPM, Hybrid Scanner, and Electrical Characterization Application Modules
20. Veeco/Digital Instruments MultiMode SPM
21. Veeco/Digital Instruments Nanoscope IIIa Scanned Probe Microscope Controller with Dimension 3000 SPM

X-ray Diffraction SEF

1. BACK REFLECTION LAUE DIFFRACTOMETER
2. Bede Triple Axis Diffractometer
3. BRUKER D8 GADDS MULTIPURPOSE DIFFRACTOMETER
4. BRUKER D8 HIGH RESOLUTION DIFFRACTOMETER
5. Bruker D8 Multipurpose Diffractometer » X-ray Diffraction
6. Bruker Single Crystal Diffractometer » X-ray Diffraction
7. Bruker Small Angle Diffractometer » X-ray Diffraction
8. BRUKER TRACER-III SD PORTABLE XRF UNIT
9. Horiba Jobin Yvon, ICP-AES » Spectroscopy
10. PANalytical Multipurpose Diffractometer » X-ray Diffraction
11. PANALYTICAL MULTIPURPOSE DIFFRACTOMETER
12. Quantum Design Inc. Magnetic Property Measurement Systems (MPMS-5S) » Magnetic Characterization, SQUID Magnetometry, Thermal Characterization
13. Quantum Design Inc. Magnetic Property Measurement Systems (MPMS-XL) » Magnetic Characterization, SQUID Magnetometry
14. Quantum Design Magnetic Property Measurement System (MPMS VSM) » SQUID Magnetometry
15. RIGAKU H3R SOURCE/BRUKER NANOSTAR SAXS SYSTEM
16. Rigaku Powder Diffractometers » X-ray Diffraction
17. RIGAKU RU-300 POWDER DIFFRACTOMETER
18. RIGAKU SMARTLAB MULTIPURPOSE DIFFRACTOMETER

Molecular Design Institute

1. Agilent 1200 Series HPLC/GPC » Gel Permeation Chromatography
2. Asylum MFP-3D-SA Atomic Force Microscope » Atomic Force Microscopy
3. CEM Discover Microwave System
4. Contact Angle Meter
5. Dimension 3100 Atomic Force Microscope » Atomic Force Microscopy
6. Dry Box » Microfabrication / Microelectronics / Clean Room
7. Electrochemical Quartz Crystal Microbalance » Electrical Characterization
8. Gas Chromatograph » Gas Chromatography
9. High Vacuum Coating System » Thin Film Processing and Deposition
10. Hydrogenerator
11. IR (Magna)
12. IR (Perkin-Elmer)
13. Langmuir-Blodgett Troughs
14. MBraun Labmaster 130 Glove Box
15. MDI Cleanroom » Microfabrication / Microelectronics / Clean Room
16. Multi-Mode Atomic Force Microscope » Atomic Force Microscopy
17. Optical Microscopes » Optical Characterization
18. PerkinElmer Pyris1 Differential Scanning Calorimetry » Calorimetry
19. PerkinElmer Pyris1 Thermogravimetric Analyzer » Thermo-Gravimetric Analysis
20. Polymer-Pen Lithography with XE Series AFM » Lithography
21. Shimadzu Analytical/Preparative HPLC/GPC » Gel Permeation Chromatography
22. Shimadzu GC-17A Gas Chromatograph » Gas Chromatography
23. Shimadzu HPLC/GPC » Gel Permeation Chromatography
24. UV-Vis » Spectroscopy
25. Vacuum Pumps
26. Water Purification System
27. X-Ray Diffractometer

Center for Atom Probe Tomography (NUCAPT)

1. 8 TB data server
2. Arc Melter
3. ESKPLA
4. Five individual high-end PC workstations
5. Ion-beam sputter system (IBS/e) manufactured by South Bay Technologies
6. LEAP 4000XSI manufactured by Imago Scientific Instruments, Madison, Wisconsin » Atom probe
7. Microway AMD Quad-core Opteron cluster
8. Specimen preparation laboratory
9. Workstation for Thermocalc, DICTra and MedeA simulations

Central Laboratory for Materials Mechanical Properties (CLaMMP)

1. Crack opening displacement gages
2. Fatigue machine, equipped with a Centorr high temperature (1100C) environmental chamber.
3. Five MTS machines (three servo-hydraulic, one servo-electric, and one screw driven tensile machine)
4. Laser extensometer crack opening displacement gages
5. Metallurgical microscope
6. Three ATS constant load creep apparatus

Electron Probe Instrumentation Center (EPIC)

1. FEI Helios Nanolab SEM/FIB » SEM
2. FEI Quanta ESEM » SEM
3. Hitachi H-8100 TEM » Transmission Electron Microscopy
4. Hitachi HD-2300A STEM » STEM
5. Hitachi S-3400N-II » SEM
6. Hitachi S-4800-II » SEM
7. Hitachi SU8030 » SEM
8. JEOL JEM-2100F Fast TEM » Transmission Electron Microscopy
9. LEO Gemini 1525 » SEM

High Resolution Electron Microscopy and Surface Structure Facility

1. Linux Clusters
2. MIBE
3. SINBAD
4. SPEAR
5. UHV-HREM

Jerome B. Cohen X-ray Diffraction Facility

1. 12 kW Cu Rigaku
2. 18 kW Cu Rigaku
3. 18 kW Mo Rigaku
4. Blake High-Resolution tangential goniometer
5. PC data analysis workstation
6. Rigaku ATX-G Thin-film Diffraction Workstation
7. Rigaku Dmax
8. Rigaku S-MAX 3000 High Brilliance SAXS-WAXS System
9. Rigaku SmartLab Thin-film Diffraction Workstation
10. Rigaku Ultima IV
11. Scintag XDS2000

Magnet, Low Temperature, and Optical Facility

1. Andor 303 mm focal length Czerny-Turner spectrograph
2. Computer-controlled Quantum Design Physical Properties Measurement System (PPMS)
3. DU420A-BEX2-DD thermoelectric cooled camera
4. EKSPLA PL2143SS
5. Lakeshore AC susceptometer
6. Quantum Design Magnetometer (MPMS5)

Materials Processing Microfabrication Cleanroom

1. Annealing Tube Furnace
2. Atomic Layer Deposition (ALD)
3. Chemical Hoods
4. Convection Ovens
5. Digital Baking Plates
6. Edwards Auto 306 e-beam Evaporator
7. Edwards Auto 500 FL400 e-beam Evaporator
8. Filmetrics F-20 Thin Film Analyzer
9. Hall Effect Measurements
10. Headway Spinners-Programmable
11. Kulicke & Soffa 4524D Ball-Ball Wire Bonder
12. Metricon 2010 Prism Coupler
13. Microscope
14. Nanomaster NPE4000 Plasma Enhanced Chemical Vapor Deposition (PECVD)
15. Omano Microscope
16. Oxford Instruments P 80 Plasma Enhanced Chemical Vapor Deposition(PECVD)
17. Oxford Instruments P 80 Reactive Ion Etcher (RIE)
18. Photolithography Wet Bench
19. Quintel Q-2000 Mask Aligner
20. Quintel Q-4000 Mask Aligner (0.5 m)
21. Rapid Thermal Processor
22. Samco RIE-10NR Reactive Ion Etcher (RIE)
23. SUSS MicroTek MABA6 Mask Aligner
24. Tencore P-10 Surface Profiler
25. West Bond 7374E Wedge-Wedge Wire Bonder

Optical Microscopy Metallography Facility

1. "Digital" darkroom
2. A semi-automatic Buehler Ecomet IV Abrasive and Polishing System
3. Alumina slurry polishing
4. Micro-hardness tester
5. Optical microscopes ranging from 6X to 1600X
6. Various 8" diameter platens

Surface Science Facility

1. Nanoindentors
2. PHI 590A Scanning Auger Microprobe
3. VG ESCA/SIMS system

NanoSystems Laboratory (NSL)

1. Bruker AXS Dimension Icon Atomic/Magnetic Force Microscope with ScanAsyst » Atomic Force Microscopy
2. Bruker D8 Discover High-Resolution Triple Axis X-Ray Diffractometer » X-ray Diffraction
3. FEI Helios Nanolab 600 Dual Beam Focused Ion Beam/Scanning Electron Microscope » Focused Ion Beam
4. Kurt J. Lesker Co. Lab 18 Thin Film Deposition System » Thin Film Deposition
5. Laurell WS-400B-6NPP-Lite Spinner
6. Minilock Phantom ICP RIE by Trion Technology » Etching
7. Quantum Design 14 T Physical Properties Measurement System with cryogenic AFM/MFM » PPMS
8. Quantum Design MPMS 3 Squid Magnetometer » SQUID Magnetometry
9. Seki Technotron Corp. AX5200M 1.5kW Microwave-Plasma Enhanced-Chemical Vapor Deposition system
10. West Bond SZ51 Wire Bonder » Wire Bonding

Central Facilities Laboratory

1. Fluorescence Optical Microscope and Optical Tweezers » Optical Characterization
2. Infrared Raman » Optical Characterization
3. Leiden 3He-4He Dilution Refrigerator » Thermal Characterization
4. Metallic Nanowires and Porous Alumina Membrane Synthesis System » Synthesis and Fabrication
5. Nanomechanical Characterization System » Optical Characterization
6. Near-field Scanning Optical Microscope (NSOM) » Optical Characterization
7. Quantum Design Model 6000 Physical Property Measurement System » Thermal Characterization
8. Thermal Evaporator » Synthesis and Fabrication
9. UV Laser Materials Processing Workstation » Optical Characterization

Materials Characterization Lab

1. AES-Physical Electronics 670; 50nm spatial resolution; in situ fracture stage » Atomic Content Characterization, Electron Microscopy, Structural Characterization, Spectroscopy, LEED/Auger Electron Spectroscopy
2. AFM-Bruker Dimension Icon; contact mode, tapping mode, peakforce tapping, PFQNM, MFM, PRM, EFM, PFKPFM, and SCM » Electrical Characterization, Magnetic Characterization, Microscopy, Image Analysis and Processing, Scanning Probe Microscopy, Polymer Characterization
3. AFM-Dimension 3100; contact mode, tapping mode, and phase imaging » Microscopy, Image Analysis and Processing, Scanning Probe Microscopy, Polymer Characterization
4. Electrical Characterization-Impedance/Current/Resistance Measuremnets, PE and Strain, Breakdown, Poling Samples » Electrical Characterization
5. ESEM-FEI Quanta 200 Environmental SEM; 10nm Resolution, BSE, EDS, and Temperature Control » Atomic Content Characterization, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Polymer Characterization, Structural Characterization
6. FESEM-FEI NanoSEM 630; 1.7nm Resolution, BSE, EDS, Beam Deceleration » Atomic Content Characterization, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Polymer Characterization, Structural Characterization
7. FIB-FEI Quanta 200 3D FIB; 3.5nm SEM Resolution, 10nm Ga+ Beam, Pt GIS, and Selective Carbon Etch GIS » Focused Ion Beam, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Structural Characterization
8. FIB-FEI Helios NanoLab 660; DualBeam SEM/FIB Platform-pushing the limits of extreme high resolution characterization in 2D an 3D, nanoprototyping, and sample preparation » Focused Ion Beam, Microscopy, Electron Microscopy, SEM, Image Analysis and Processing, Structural Characterization
9. FTIR-Bruker Hyperion 3000 Microscope; Transmission, Specular Reflectance, ATR, and Relflection Absoprtion » Image Analysis and Processing, Polymer Characterization, Circular Dichrosim, Spectroscopy, FTIR/Raman Spectroscopy
10. FTIR-Bruker IFS 66/S and Bruker Vertex V70; Near-IR/Mid-IR/Far-IR, Step Scan, Interchangeable Optical Components » Image Analysis and Processing, Polymer Characterization, Circular Dichrosim, Spectroscopy
11. Nanoindentation-Hysitron TriboIndenter TI 900; <1nN Load Resolution, Load or Displacement Controlled Measurments » Microscopy, Image Analysis and Processing, Scanning Probe Microscopy
12. Optical Profilometer-ZYGO NewView 7300; Surface Topography, Coating Thickness, Step Height, and 3D Imaging » Optical Characterization, Profilometry, Structural Characterization
13. Particle Sizing-Malvern Mastersizer "S"; Laser Diffraction for Coatings, Ceramics, Cosemetics, Cement, Food, and Clays » Polymer Characterization, Structural Characterization
14. Particle Sizing/Zeta Potential-Malvern Zetasizer ZS; Dynamic Light Scattering for Proteins, Polymers, Micelles, Carbohydrates, Nanoparticles, Colloidal Dispersions, and Emulsions » Polymer Characterization, Dynamic Light Scattering, Structural Characterization
15. Raman-WITec Confocal Raman » Image Analysis and Processing, Optical Characterization, Polymer Characterization, Spectroscopy, FTIR/Raman Spectroscopy
16. SAXS-Molecular Metrology SAXS » Polymer Characterization, Structural Characterization, X-ray Diffraction
17. STEM-FEI Titan 3 G2; 0.7A Resolution, EDS, EELS, and EFTEM » Atomic Content Characterization, Microscopy, Electron Microscopy, STEM, Image Analysis and Processing
18. STEM-JEOL 2010F; 2.0A Resolution, EDS, and EELS » Atomic Content Characterization, Microscopy, Electron Microscopy, STEM, Image Analysis and Processing
19. Surface Area-Gemini 2360 Surface Area Analyer » Polymer Characterization, Structural Characterization
20. Surface Area-Micromeritics ASAP 2020 » Polymer Characterization, Structural Characterization, Porosimetry
21. Surface Area-Micromeritics ASAP 2920 » Polymer Characterization, Structural Characterization
22. TEM-JEOL 2010; 2.3A Resolution, EDS, EELS and EFTEM » Atomic Content Characterization, Microscopy, Electron Microscopy, Transmission Electron Microscopy, Image Analysis and Processing
23. TEM-Phillips 420; 3.4A Resolution with EDS » Atomic Content Characterization, Microscopy, Electron Microscopy, Transmission Electron Microscopy, Image Analysis and Processing
24. TGA-MS-TGA Q50 with a Pfeiffer Vacuum Mass Spectrometer » Thermal Characterization, Thermo-Gravimetric Analysis
25. UV-VIS-NIR-Perkin-Elmer Lambda 950 UV-VIS NIR Spectrophometer » Optical Characterization, Optical Spectrometry, Polymer Characterization, Spectroscopy
26. XPS-Kratos Analytical Axiz Ultra » Atomic Content Characterization, Polymer Characterization, Structural Characterization, XPS
27. XRD-Multiwire Laue; Back-Reflection Mode for Single Crystal Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
28. XRD-PANalytical Empryean; Reflection Mode for Powder/Bulk Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
29. XRD-PANalytical Xpert Pro MPD; Reflection Mode for Powder/Bulk/Thin Film Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
30. XRD-Phillips MRD; Reflection Mode for Bulk and Thin Film Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction
31. XRD-Rigaku DMAX-Rapid II; Reflection or Transmission Mode for Powder/Bulk/Thin Film/Single Crystal Applications » Polymer Characterization, Structural Characterization, X-ray Diffraction

Imaging and Analysis Center

1. Allied Multi Prep Polisher
2. AmScope Stereo Microscopes » Optical Microscopy
3. Anton Paar MCR501 Rheometer » Thermal Characterization
4. Anton Paar MCR502 Rheo-Confocal System » Thermal Characterization
5. Anton Paar MCR702 Rheometer » Thermal Characterization
6. Bruker D8 Advance XRD » X-ray Diffraction
7. Bruker D8 Discover X-Ray Diffractometer » X-ray Diffraction
8. Bruker Dimension ICON3 AFM » Scanning Probe Microscopy
9. Bruker Multimode AFM » Atomic Force Microscopy
10. Bruker NanoMan AFM Dimension 3000 AFM » Atomic Force Microscopy
11. Computer Cluster » Computing / Simulation
12. CreaTec LT-HV nc-AFM/STM » Scanning Probe Microscopy
13. Cressington Carbon Coater » Image Analysis and Processing
14. Diamond Knives » Image Analysis and Processing
15. Differential Scanning Calorimeter 8500 (DSC) » Calorimetry
16. Dimpler » Image Analysis and Processing
17. Dynamic Mechanical Analysis 8000 (DMA) » Thermal Characterization
18. Evactron Plasma Cleaner » Image Analysis and Processing
19. FEI CM100 TEM » Transmission Electron Microscopy
20. FEI CM200 FEG-TEM with EDS/EELS » Transmission Electron Microscopy
21. FEI Helios G3 DualBeam FIB/SEM with EDS » Focused Ion Beam
22. FEI Quanta 200 FEG Environmental-SEM with EDS/EEL » SEM
23. FEI StrataTM DB 235 FIB » Focused Ion Beam
24. FEI Verios 460 XHR SEM with EDS » SEM
25. FEI Vitrobot Units » Image Analysis and Processing
26. FEI XL30 FEG-SEM » SEM
27. Fischione 1010 dual-beam Ion Mill » Image Analysis and Processing
28. Fischione NanoClean Station » Image Analysis and Processing
29. FLS980 Steady State, Phosphorescence/Flourescence Lifetime Spectrometer » Spectroscopy
30. Glass Knife Maker » Image Analysis and Processing
31. Horiba Raman Spectrometer
32. Isitemp Oven » Image Analysis and Processing
33. Keithley 4200-SCS Semiconductor Characterization System » Thermal Characterization
34. Keyence VK-X1000 Confocal Microscope » Optical Microscopy
35. Leica Confocal DCM 3D
36. Leica Sputter Coater » Image Analysis and Processing
37. Leica Ultracut UCT Ultramicrotome Instrument
38. Low-speed Diamond Saw » Image Analysis and Processing
39. Nicolet iN10 MX FTIR » Spectroscopy
40. Optical Microscope w/CCD Camera » Image Analysis and Processing
41. Plasma Cleaner » Image Analysis and Processing
42. Reichert-Jung Ultracut E Microtome » Image Analysis and Processing
43. Rigaku MiniFlex XRD » X-ray Diffraction
44. Spectrometer (TGA-GC/MS) » Thermal Characterization
45. Talos F200X S/TEM with SuperX-EDS » Transmission Electron Microscopy
46. TEM sample cutter » Image Analysis and Processing
47. Thermo K-alpha X-ray Photoelectron Spectrometer (XPS/UPS) » Spectroscopy
48. Thermogravimetric Analyzer coupled to Clarus 680 SQ 8T Gas Chromatograph Mass » Thermo-Gravimetric Analysis
49. Tital Themis 80-300 Cubed Double Cs-corrected S/TEM with EDS » Transmission Electron Microscopy
50. Titan Krios G3 300 cryo-TEM » Transmission Electron Microscopy
51. Ultrasonic Cutter » Image Analysis and Processing
52. UV-VIS Cary 5000 Spectrometer » Spectroscopy
53. VCR IBS/TM 200S Ion Bean Sputterer » Image Analysis and Processing
54. Woollam M-2000 Ellipsometer
55. Zeiss Axios Scope A1 Transmission, Reflection, Polarizing Microscope » Optical Microscopy
56. Zeiss Discovery V12 Stereomicroscope » Optical Microscopy
57. Zeiss Xradias Versa 520 3D X-ray microscope » X-ray Diffraction

Micro/Nano Fabrication Laboratory (MNFL)

1. AG Associates / Mini-Pulse
2. AJA Dielectric Sputterer
3. Angstrom E-Beam
4. Angstrom Sputterer
5. Brewer Science / CEE 1100
6. Buehler / Minimet 1000
7. Cambridge NanoTech / Savannah 100
8. CPD - 030
9. CVD 2 Stack Furnace
10. Dektak / IIa
11. Denton / DV-502A
12. Dicing Saw/ADT proVectus 7100
13. Edwards / E306A
14. Electronic Micro Systems / 1000-1
15. Explorer / E 11140
16. Flip Chip Bonder / Research Devices / M8A
17. Gaertner L3W16
18. Headway / Spinners
19. Heidelberg / DWL66
20. K & S Wire Bonder
21. Karl Suss / MJB4
22. Karl Suss/ MA6
23. KLA-Tencor / P-15
24. Loomis / 789
25. Met One / GT-521
26. Mitutoyo / 543-523-1 and Mitutoyo / 542-256B
27. Nanonex / NX2000-4
28. NanoSpec / AFT
29. Optical Microscopes
30. Plasma-Therm / 720 SLR
31. Plasma-Therm / 790
32. Raith / e LINE
33. RCA Wet Hood
34. RTP-600S Rapid Thermal Annealer
35. SAMCO RIE200iP
36. SAMCO RIE800iPB
37. SemiTool Spin-Dryers
38. Spin Processor EDC-650Mz
39. STS
40. Technics / Micro 800
41. TePla / M4L
42. Thermco / Brute IV
43. Tystar Tytan Stack Four Horizontal Tube Furnaces LPCVD
44. UVOCS / T10X19 OES
45. Varian / 979
46. Varian ML91 Ampoule Sealer
47. VWR / 1410 Vacuum Oven
48. West Bond / 7400A
49. West Bond / 7700B
50. Yield Engineering Systems / YES-310TA

Princeton Institute for Computational Science and Engineering (PICSciE)/Terascale Infrastructure for Groundbreaking Research in Science and Engineering (TIGRESS)

1. Della » Computing / Simulation

Microscopy and Microanalysis Facility

1. Asylum MFP-3D Bio System w/ Olympus IX71 Inverted Microscope » Scanning Probe Microscopy
2. Asylum MFP-3D Standard System w/Low Force Indenter » Scanning Probe Microscopy
3. FEI DB235 Dual-Beam Focus Ion Beam System (FIB) w/ EDS » Focused Ion Beam
4. FEI Inspect S Electron Scanning Microscope w/ Cathodoluminescence System » SEM
5. FEI Tecnai G2 Sphera Microscope for Life Science Studies » Transmission Electron Microscopy
6. FEI Tecnai G2 Sphera Microscope w/ EDS System for Materials Science Studies » Transmission Electron Microscopy
7. FEI Titan 300 kV FEG TEM/STEM System w/EDS & EELS » Transmission Electron Microscopy, STEM
8. FEI XL30 Sirion FEG Digital Electron Scanning Microscope » SEM
9. FEI XL40 Sirion FEG Digital Scanning Microscope w/EDS » SEM
10. Imago LEAP 3000X HR Atom Probe Microscope » Atom probe
11. Kratos Axis Ultra X-ray Photoelectron Spectroscopy (XPS) system » XPS
12. Physical Electronics 6650 Dynamic Secondary Ion Mass Spectrometry (SIMS) » SIMS
13. Veeco Dimension 3000/3100 Scanning Probe Microscope » Scanning Probe Microscopy
14. Veeco Multi-Mode NanoScope I & II » Scanning Probe Microscopy

Polymer Characterization Facility

1. DLS » Dynamic Light Scattering
2. DSC » Calorimetry
3. Gas Chromatograph » Gas Chromatography
4. GPC - DMF » Gel Permeation Chromatography
5. GPC - chloroform » Gel Permeation Chromatography
6. GPC - MALS » Gel Permeation Chromatography
7. GPC - Prep » Gel Permeation Chromatography
8. Microwave Reactor (Biotage) » Microwave Reactor
9. Microwave Reactor (CEM) » Microwave Reactor
10. Nano ITC » Calorimetry
11. Rheometer with oven » Rheometry
12. Rheometer with water bath » Rheometry
13. Viscolite 700HP Bench Viscometer » Structural Characterization

Spectroscopy Facility

1. ASCEND 400MHz WB NMR/DNP Spectrometer for Solids » NMR - Nuclear Magnetic Resonance
2. Avance 800MHz SB NMR Spectrometer for Solids/Liquids » NMR - Nuclear Magnetic Resonance
3. Avance DMX500MHz SB NMR Spectrometer for Solution » NMR - Nuclear Magnetic Resonance
4. Avance DSX300MHz WB NMR Spectrometer for Solids » NMR - Nuclear Magnetic Resonance
5. Avance IPSO500MHz WB NMR Spectrometer for Solids » NMR - Nuclear Magnetic Resonance
6. Bruker 300MHz SWB MRI/Diffusion Spectrometer » NMR - Nuclear Magnetic Resonance
7. Bruker EMXplus EPR Spectrometer » NMR - Nuclear Magnetic Resonance
8. Nicolet Magna 850 FTIR Spectrometer with FT-Raman module » FTIR/Raman Spectroscopy
9. Q-Sense E4 Quartz Crystal Microbalance (QCM-D) » Structural Characterization
10. Varian Cary Eclipse Fluorimeter » Optical Spectrometry
11. Varian VNMRS 600MHz SB NMR Spectrometer for Solution » NMR - Nuclear Magnetic Resonance

TEMPO Facility

1. Differential Scanning Calorimeter » Calorimetry
2. DynaCool PPMS » PPMS
3. High Temperature Powder XRD » X-ray Diffraction
4. Horiba FluoroMax 4 spectrometer
5. Inductively Coupled Plasma » ICP Atomic Emission Spectroscopy
6. METTLER TGA/sDTA851e ThermoGravimetric Analyzer With Blazers ThermoStar 300 AMU Mass Spectrometer » Thermo-Gravimetric Analysis
7. Micromeritics AccuPyc 1340 Pycnometer
8. MicroMeritics TriStar Porosimeter » Porosimetry
9. Physical Properties Measurement System » PPMS
10. Quantum Design MPMS 5XL SQUID Magnetometer » SQUID Magnetometry
11. Shimadzu UV3600 UV-Nir-NIR Spectrometer » Optical Spectrometry
12. The Olympus BX41 Fluorescence Microscope » Optical Microscopy
13. Thermogravimetric Analyzer » Thermo-Gravimetric Analysis
14. Thermogravimetric Analyzer Mass Spectrometer » Atomic Content Characterization

Terahertz Facility

1. The UCSB Free Electron laser source » Free Electron Laser

X-ray Facility

1. Ancillary Equipment » Optical Characterization
2. Confocal Microscope » Optical Characterization
3. Four Circle Wide Angle X-ray Diffractometer(WAXS) » X-ray Diffraction
4. Intermediate Small Angle Diffractometer (2-Circle) » X-ray Diffraction
5. Panalytical MRD PRO Materials Research Diffractometer » X-ray Diffraction
6. Philips X’PERT MPD » X-ray Diffraction
7. Rigaku Smartlab High-Resolution Diffractometer » X-ray Diffraction
8. Small Angle X-ray Scattering (SAXS) Diffractometer » X-ray Diffraction

Fast X-Ray Imaging Facility

1. OrthoScan HD mini C-arm X-ray system

Image Processing Facility

1. Vision Research Phantom High-Speed Cameras » Image Analysis and Processing

Institute for Biophysical Dynamics Nanobiology Facility

1. ISS ChronosBH TCSPC Fluorometer » Confocal Fluorescence Microscopy, Spectroscopy

Materials Preparation and Measurement Laboratory (MPML)

1. Agilent 8453 UV/VIS Spectrophotometer » Optical Spectrometry
2. Agilent Cary 5000 UV/VIS/NIR Spectrophotometer » Optical Spectrometry
3. Asylum Cypher ES AFM » Atomic Force Microscopy
4. Asylum MFP-3D-BIO AFM » Atomic Force Microscopy
5. Bruker Multimode 5 AFM with Nanoscope IIIa Controller » Atomic Force Microscopy
6. Bruker Multimode 8 AFM with Nanoscope V Controller » Atomic Force Microscopy
7. Bruker Standalone STM with Nanoscope IIIa Controller » Scanning Tunneling Microscopy
8. Buehler ECOMET 3 » Synthesis and Fabrication
9. Carl Zeiss Merlin SEM » Electron Microscopy, SEM
10. FEI Nova NanoSEM 230 » SEM
11. Gaertner Stokes WAFERSKAN Ellipsometer » Ellipsometry
12. Hitachi S-2700 » SEM
13. HJY Fluorolog-3 Spectrofluorometer » Optical Spectrometry
14. Kulicke & Soffa 4526 Wire Bonder » Wire Bonding
15. LabRamHR Evolution Confocal Raman Microscope » Microscopy, Optical Microscopy, FTIR/Raman Spectroscopy
16. Low Speed Diamond Wheel Saw
17. Malvern Zetasizer Nano ZS » Dynamic Light Scattering
18. MINIMET 1000 Grinder-Polisher » Synthesis and Fabrication
19. Optical Microscope » Optical Microscopy
20. Plasma Etch PS-100LF » Etching
21. Quartz Tube Furnaces » Furnaces
22. South Bay Technology RIE-2000
23. Specialty Coating Systems Spincoater P6700 » Lithography
24. TA Instruments SDT Q600 DSC/TGA » Calorimetry, Thermo-Gravimetric Analysis
25. Ted Pella Sputter Coater » Thin Film Processing and Deposition
26. ULS VLS4.60 Laser Cutter » Synthesis and Fabrication
27. UV Exposure System » Lithography
28. V&N E-Gun Evaporator » Thin Film Deposition

Microfluidics Facility

1. Harrick PDC-001 Plasma Cleaner

Quantum Transport Laboratory

1. Alcatel ASM GraphD+ He Leak Checker
2. PPMS » PPMS

Rheometry Facility

1. Anton Paar MCR 301 rheometer » Rheometry

Transmission Electron Microscopy

1. FEI Tecnai G2 F30 Super Twin microscope » Transmission Electron Microscopy
2. FEI Tecnai Spirit Bio-Twin » Transmission Electron Microscopy

Freeze-Fracture Transmission Electron Microscopy

1. 100 KV TEM » Transmission Electron Microscopy
2. Freeze-etch system » Etching

X-ray Diffraction Facility

1. single-crystal x-ray scattering system » X-ray Diffraction
2. wide angle x-ray scattering system » X-ray Diffraction

UD Advanced Materials Characterization Lab

1. Mass Spec & Chemical Analysis (Metrohm IC Pro, Elementar CHNS, Agilent 7500 ICP/MS, Thermo Fisher ICAP/TQ) » Mass/Density Characterization
2. Porosity & Particle Size (Wyatt Mobius DLS Zeta Potential, Micromeritics ASAP 2020 BET Analyzer, Beckman Coulter LS 13 320 Particle Size Analyzer, VCA optima Contact Angle, Sigma 700 Surface Tension) » Porosimetry
3. Thermal Analysis (TA DTC 300, TA Q800 DMA, TA Q600 HT TGA/DSC, Discovery DSC, Discovery TGA) » Thermal Characterization
4. Vibrational (Anasys Nano IR2, FTIR, ATIR, Rama Spectrometer, neaSNOM Microscope) » Microscopy
5. X-Ray Analysis (Bruker D8 XRD, Rigaku Ultima IV XRD, Rigaku Supermini 200 WDXRF, Xenocs SAXS/WAXS, Rigaku NANO 3DX CT Scanner, Rigaku GX 130 CT Scanner) » X-ray Diffraction

UD Keck Center for Advanced Microscopy and Microanalysis

1. Auriga 60 CrossBeam (FIB/FE-SEM) » Microscopy
2. Dimension-3100 V SPM » Microscopy
3. JEM-2010F (200kV FE-TEM) » Microscopy
4. JEM-3010 (300kV TEM) » Microscopy
5. JSM-7400F (FE-SEM) » Microscopy
6. MultiMode NanoScope V SPM » Microscopy
7. Talos F200C (200kV FE-TEM) » Microscopy
8. Tecnai G2 12 (120kV TEM) » Microscopy

UD Materials Growth Facility

1. AJA ATC-2200-UHV sputtering system » MBE, Thin Film Deposition
2. Veeco GENxplor MBE - chalcogenides » MBE, Thin Film Deposition
3. Veeco GENxplor MBE - III-V semiconductors » MBE, Thin Film Deposition

1. UD Materials Growth Facility » Synthesis and Fabrication, Crystal Growth, MBE, Thin Film Processing and Deposition, Thin Film Deposition

University of Delaware Nanofabrication Facility

1. Deposition (ALD, Evaporators, PECVD, PLD, Sputterer) » Microfabrication / Microelectronics / Clean Room
2. Dry Etch (Asher, Chlorine ICP, Fluorine ICP, Ion Mill, Plasma Cleaner) » Microfabrication / Microelectronics / Clean Room
3. Film Casting (E-beam SBU1, E-beam SBU2, Photo SBU1, Photo SBU2, SU-8 SBU) » Microfabrication / Microelectronics / Clean Room
4. Lithography (E-beam Writer, Laser Writer, Mask Aligner) » Microfabrication / Microelectronics / Clean Room
5. Metrology (Ellipsometer, Four-Point Probe Station, Microscopes, Profilometer, SEM) » Microfabrication / Microelectronics / Clean Room
6. Miscellaneous (Critical Point Dryer, Developing Station, Mask Cleaner Station, Ozone Cleaner, Wet Benches) » Microfabrication / Microelectronics / Clean Room
7. Packaging (Dicing Saw, Wire Bonder) » Microfabrication / Microelectronics / Clean Room
8. Thermal Processing (HMDS Oven, Rapid Thermal Processor, Tube Furnace, Vacuum Ovens) » Microfabrication / Microelectronics / Clean Room

Materials Research Laboratory Central Research Facilities

1. Biological sample preparation and analysis services » Structural Characterization, Polymer Processing
2. Center for Excellence in Soft Materials » Structural Characterization, Dynamical Mechanical Analysis, Thermal Characterization, Calorimetry, Thermo-Gravimetric Analysis
3. Electron Microscopy Core » Electron Microscopy
4. Laser and Optical Spectroscopy » Optical Characterization, Spectroscopy
5. Micro/Nano Fabrication and Cleanroom » Synthesis and Fabrication, Thin Film Processing and Deposition, Thin Film Deposition, Microfabrication / Microelectronics / Clean Room, Lithography, Etching, Furnaces
6. Scanning probe microscopy » Scanning Probe Microscopy, Atomic Force Microscopy, Scanning Tunneling Microscopy
7. Surface Analysis » Atom probe, Profilometry, LEED/Auger Electron Spectroscopy, Rutherford Backscattering Spectrometry, SIMS, XPS
8. X-ray analysis » X-ray Diffraction

Small Spot X-Ray Photoelectron Spectrometer

1. Kratos Axis 165 XPS » XPS

Electron and Optical Microscopy

1. FEI Magellan 400 Scanning Electron Microscope » SEM
2. FEI TecnaiT12 Transmission Electron Microscope » Transmission Electron Microscopy
3. JEOL 2200FS Energy Filtered Transmission Electron Microscope » Transmission Electron Microscopy
4. JEOL JEM-2000FX Transmission Electron Microscope » Transmission Electron Microscopy
5. JEOL JSM-6320 Scanning Electron Microscope » SEM
6. Leica SP2 Laser Scanning Confocal Microscope » Confocal Fluorescence Microscopy
7. Olympus BX-51 Optical Microscope » Optical Microscopy

Gel Permeation Chromatography

1. Agilent 1100 (MALLS)-Currently in Tetrahydrofuran » Gel Permeation Chromatography
2. Agilent 1200-Trifluoroethanol » Gel Permeation Chromatography
3. Agilent 1260-Tetrahydrofuran » Gel Permeation Chromatography
4. Knauer-Dimethylformamide » Gel Permeation Chromatography
5. Polymer Labs- Trichlorobenzene (High Temperature)
6. Polymer Labs-Aqueous
7. Polymer Labs-Chloroform

Mass Spectrometry Facility (UMASS-MSC)

1. ABI-SCIEX QSTAR-XL
2. Bruker OmnifleX MALDI-TOF
3. Esquire-LC Ion Trap
4. HP 5890 Series II Gas Chromatograph » Gas Chromatography
5. JEOL-700 MStation

Nanostructures Laboratory

1. DI Dimension-3000 and Dimension-3100 AFM » Atomic Force Microscopy
2. DI Nanoscope-IV Multimode AFM » Atomic Force Microscopy
3. Filmetrics Optical Profilometer » Profilometry
4. Sopra Variable Angle Spectroscopic Ellipsometer
5. Veeco Dektak Stylus Profilometer » Profilometry

Nuclear Magnetic Resonance Facility

1. Agilent 700 » NMR - Nuclear Magnetic Resonance
2. Avance400 » NMR - Nuclear Magnetic Resonance
3. DPX300 » NMR - Nuclear Magnetic Resonance
4. DSX300 » NMR - Nuclear Magnetic Resonance
5. Infinity300 » NMR - Nuclear Magnetic Resonance

Rheology Facility

1. AIC Linear Rheometer » Rheometry
2. Gottfert Rheograph Capillary Melt Rheometer » Rheometry
3. Rheometrics Mechanical Spectrometer

Characterization Facility (CharFac)

1. 2 meter – 2D Area Detector » X-ray Diffraction
2. 6 meter - 2D Area Detector » X-ray Diffraction
3. Agilent 5500 environmental SPM plus high-speed force-curve mapping and multifrequency methods » Scanning Probe Microscopy
4. Agilent 5500 environmental SPM plus inverted light microscope » Scanning Probe Microscopy
5. Auger Electron Spectroscopy » LEED/Auger Electron Spectroscopy
6. Bruker Nanoscope V Multimode 8 with QNM » Scanning Probe Microscopy
7. Bruker-AXS Microdiffractometer » X-ray Diffraction
8. Cold Field Emission Gun Scanning Electron Microscope » SEM
9. Confocal Raman Microscope » FTIR/Raman Spectroscopy
10. Diffractometer » X-ray Diffraction
11. Diffractometer » X-ray Diffraction
12. FEI Tecnai G2 F30
13. Field Emission Gun Cryo Transmission Electron Microscope » Transmission Electron Microscopy
14. Field Emission Gun Scanning Electron Microscope
15. Field Emission Gun Scanning Electron Microscope » SEM
16. Field Emission Gun Transmission Electron Microscope » Transmission Electron Microscopy
17. Fourier-Transform Infrared Spectrometer (FTIR) » FTIR/Raman Spectroscopy
18. Ion Beam Analysis » Focused Ion Beam
19. Microdiffractometer » X-ray Diffraction
20. micromechanical tester
21. Microscopic Contact Angle Meter
22. NanoIndenter
23. Nanoscope V Multimode 8 » Atomic Force Microscopy
24. Panalytical X'Pert Pro » X-ray Diffraction
25. Spectroscopic Ellipsometer
26. Tencor P10 Profilometer
27. Theta-Theta Diffractometer » X-ray Diffraction
28. Transmission Electron Microscope » Transmission Electron Microscopy
29. Transmission Electron Microscope » Transmission Electron Microscopy
30. Transmission Electron Microscope » Transmission Electron Microscopy
31. Transmission Electron Microscope » Transmission Electron Microscopy
32. Triboindenter
33. Video-Enhanced Microscope (VEM)
34. X-Ray Diffractometer » X-ray Diffraction
35. X-Ray Diffractometer » X-ray Diffraction
36. X-ray Photoelectron Spectroscopy (ESCA)
37. X-ray Photoelectron Spectroscopy (ESCA)

Mass Spectrometry Lab

1. 4800 MALDI-TOF/TOF Mass Spectrometer
2. 5800 MALDI-TOF/TOF Mass Spectrometer
3. Bruker BioTOF II
4. CyTOF2 Mass Cytometer
5. Waters Acquity UPLC/Synapt G2 QTOF MS
6. Waters Acquity UPLC/TQD

Minnesota Nano Center (MNC)

1. AJA Sputterer
2. AJA Sputterer 2
3. ALD
4. Amray FESEM
5. Asher
6. Atomic Force Microscope
7. AV Etcher
8. Canon Stepper
9. CEE 200X Spinner
10. CHA Evaporator
11. Confocal Microscope » Microscopy
12. Critical Point Dryer
13. CV-IV
14. DC Sputter
15. Deep Trench Etcher
16. Dektak
17. Exhausted Blue M Oven » Ovens
18. FEI FIB » Focused Ion Beam
19. Four Point Probe
20. Gaertner Ellipsometer
21. Hard Bake Oven » Ovens
22. Headway
23. Ion Mill
24. JEOL SEM » SEM
25. Karl Suss Contact Mask Aligner » Lithography
26. Karl Suss Contact Mask Aligner
27. KLA-Tencor P-16
28. LPCVD
29. Mask Maker
30. Mini-Brute Furnace
31. MJB-3
32. Nanonex NX-B200 Nanoimprinter
33. Nanospec-1
34. Nanospec-2
35. Oriel
36. Oxford » Etching
37. PECVD
38. Prebake Dehydration Oven » Ovens
39. Precision Spin Coater
40. Precision Spin Coater
41. RTA-1
42. Rudolph Ellipsometer
43. SB6
44. Soft Bake Oven » Ovens
45. Spray/Puddle Developer
46. Stress Test-1
47. STS Etcher » Etching
48. SUPER-NUOVA Hot Plates » Ovens
49. Temescal E-beam
50. Thermal Evaporator
51. Tylan Furnace Bank
52. UVO Cleaner
53. Varian E-beam
54. Vistec EBPG5000+ » Lithography
55. Wafer Saw
56. Wet Benches
57. Xenon di-fluoride e1-series etching system » Etching
58. YES 310

Nuclear Magnetic Resonance (NMR) Lab

1. Bruker Avance III 500 » NMR - Nuclear Magnetic Resonance
2. VAC-200 » NMR - Nuclear Magnetic Resonance
3. VAC-300 » NMR - Nuclear Magnetic Resonance
4. Varian Inova 300 » NMR - Nuclear Magnetic Resonance
5. Varian Inova 500 » NMR - Nuclear Magnetic Resonance
6. VXR-300 » NMR - Nuclear Magnetic Resonance

Polymer Characterization Facility

1. Agilent PL-GPC 220 High Temperature GPC/SEC System Waters Modular Room Temperature System » Gel Permeation Chromatography
2. DACA Mixer and Molder
3. Extensional tools for rotational rheometers » Rheometry
4. Goettfert Visco-Tester 1500 » Rheometry
5. Malvern Rosand RH7 » Rheometry
6. Rheometric Scientific RSA-11 » Rheometry
7. Rheometric Scientific SR200 » Rheometry
8. TA Instruments AR-G2 » Rheometry
9. TA Instruments ARES-G2 » Rheometry
10. TA Instruments DHR-3 » Rheometry
11. TA Instruments Q1000 for -180 to 300 degrees C » Calorimetry
12. TA Instruments Rheometric Series ARES » Rheometry
13. TA Instruments RSA-G2 » Rheometry
14. Thermo Electron Polylab with Rheomix 600 » Rheometry
15. Thermo Electron PRISM 16mm Twin Screw Extruder

X-Ray Crystallographic Facility

1. Bruker-AXS SMART APEX-II » X-ray Diffraction
2. Bruker-AXS Venture PHOTO-100 Kappa axis » X-ray Diffraction

Electron Nanoscopy Instrumentation

1. FEI Nova NanoSEM 450 » SEM
2. FEI Tecnai Osiris (S)TEM » Electron Microscopy
3. JEOL JEM 2010 TEM » Transmission Electron Microscopy
4. Specimen Preparation Equipment » Electron Microscopy

Nanofabrication and Clean-Room

1. AJA ATC-ORION 8000 E-beam Evaporation System » Thin Film Deposition
2. Electron Beam Lithography System (EBL) » Lithography
3. FEI Strata 200xp Focused-Ion Beam Workstation » Focused Ion Beam
4. Intlvac Nanoquest-I Ion Beam Etching and Milling System » Etching

Nanomaterials & Thin Films

1. ATC-2000F AJA Sputtering System » Thin Film Deposition
2. PVD PLD-MBE 2500 Pulsed Laser Deposition System » Pulsed Laser Deposition

Surface & Materials Characterization

1. Bruker Dimension ICON Atomic Force Microscope » Scanning Probe Microscopy
2. DI EnviroScope Atomic Force Microscope » Scanning Probe Microscopy
3. DI Nanoscope IIIa Dimension 3100 SPM system » Scanning Probe Microscopy
4. Thermal Analysis Systems » Thermal Characterization

X-Ray Structural Characterization

1. Bruker Photon 100 Single Crystal Diffractometer » X-ray Diffraction
2. Bruker-AXS D8 Discover Diffractometer » X-ray Diffraction
3. PANalytical Empyrean Diffractometer » X-ray Diffraction
4. Rigaku D/Max-B Diffractometer » X-ray Diffraction
5. Rigaku Multiflex Diffractometer » X-ray Diffraction
6. Rigaku SmartLab Diffractometer » X-ray Diffraction

Dual Source and Environmental X-ray Scattering

1. Multi-angle x-ray diffractometer system (MAXS) » X-ray Diffraction

Electron Microscopy Facility

1. F200 scanning / transmission electron microscope » Transmission Electron Microscopy
2. FEI 600 Quanta FEG ESEM » SEM
3. FEI Strata DB235 Focused Ion Beam » Focused Ion Beam
4. JEOL 2010 TEM » Transmission Electron Microscopy
5. JEOL 2010F FEG HRTEM » Transmission Electron Microscopy
6. JEOL 7500F HRSEM » SEM
7. NEOARM Aberration-corrected scanning / transmission electron microscope » Transmission Electron Microscopy

Optical Imaging and Micromanipulation

1. Brookhaven Instruments, BI-200SM
2. Leica DMIR13/VT-Eye Confocal » Confocal Fluorescence Microscopy
3. Leica DMRX
4. Leica DMRX A2 (Spinning Disk Confocal equipment available) » Optical Microscopy
5. Nikon Eclipse 200/Confocal VT Eye » Optical Microscopy
6. VisiTech 'VT-Eye'
7. Zeiss Axiovert 135/Optical Tweezer » Optical Microscopy

Property Measurement Facility

1. Princeton Instruments TriVista Spectrometer with Si and InGaAs array detectors » Spectroscopy
2. Quantum Design Magnetic Property Measurement System (SQUID magnetometer) » SQUID Magnetometry
3. Quantum Design Physical Properties Measurement System » PPMS

Rheology Center

1. Bohlin Gemini » Rheometry
2. Haake CaBER » Rheometry
3. Instron Model 5564 Table Mounted Materials Testing System
4. Nikon Eclipse 200/Confocal VT Eye » Optical Microscopy
5. TA Instruments RFS II » Rheometry

CDCM Shared Experimental Facilities

1. Andor spectrometer » Spectroscopy
2. BI-200SM laser light scattering system » Dynamic Light Scattering
3. Cryostation s100 (Fusion) Foundation (NEMA) » Optical Characterization
4. Discovery Hybrid Rheometer » Rheometry
5. Glove Box » Synthesis and Fabrication
6. Glove Boxes » Synthesis and Fabrication
7. Harmonic Generator HIRO » Spectroscopy
8. High Power Femtosecond DPSSL System CARBIDE-40W » Spectroscopy
9. Optical Parametric Amplifiers ORPHEUS-HP-SH-DFG OPA » Spectroscopy
10. Scanning near-field optical microscope (NeaSNOM) » Optical Microscopy, Near Field Scanning Microwave Microscopy, Optical Characterization, Optical Spectrometry, Spectroscopy, FTIR/Raman Spectroscopy
11. Superconducting Nanowire Single-Photon Detectors » Optical Characterization, Optical Spectrometry, Spectroscopy
12. White Light Generator » Spectroscopy

Texas Materials Institute

1. Atomic Force Microscope: Asylum Research MFP-3D System » Atomic Force Microscopy
2. Atomic Force Microscopes: Park Scientific » Atomic Force Microscopy

Surface Analysis and nano-Scale Imaging in the Micron Technology Foundation, Inc. Microscopy Suite

1. Atomic Force Microscope
2. Digital Comparator (Vertex 220 microVu) » Optical Microscopy
3. Imaging System, XPS
4. Ion Polishing Mill
5. JEM 2800 analytical S/TEM with dual 100mm2 EDS detectors » STEM
6. Microscope, BF/DF/Nomarski
7. Microscope, Scanning Laser Confocal Fluorescence
8. Optical Profilometer
9. SEM
10. SEM with Dual Beam FIB
11. SEM with EDAX
12. Spectroscopic Ellipsometer
13. Vibrating magnetometer (Microsense FCM-10) » Magnetic Characterization
14. XRF Analyzer

Utah MRSEC Affiliated Labs

1. (3+3)-Pass Tandem Fabry-Perot Interferometer » Optical Characterization
2. Analytical Laser Spectroscopy Laboratory » Spectroscopy
3. Femtosecond Laser Systems
4. Mechanical Behavior Laboratory
5. Microsystems Lab
6. Microtomography Lab: MicroCT » Microscopy
7. Organic spintronics Deposition System » Synthesis and Fabrication
8. The Magnetic Resonance Laboratory (EPR, ENDOR, ELDOR) » Spectroscopy
9. The Sagnac Interferometer Laboratory MOKE » Optical Characterization
10. THz Time-Domain Spectrometer » Optical Characterization
11. Utah State Center for Excellence for Biomedical Microfluidics » Synthesis and Fabrication
12. UV Time-Resolved Spectroscopy System based on a Coherent Chameleon ultrafast laser » Spectroscopy

UtahNanofab

1. ALD System
2. Aligner
3. Aligner
4. Aligner
5. Analytical Probe Station
6. CMP System
7. CV System
8. Dicing Saw
9. Dicing Saw
10. Diffusion/Anneal Furnace
11. E-Beam Evaporator
12. E-Beam Evaporator
13. Electrical Test Station
14. Heidelberg uPG101 900nm, 1um, 5um » Lithography
15. Laser Micromachining System
16. Laser Pattern Generation System
17. Lasermarker, Nd-YAG
18. LPCVD Doped/Undoped Polysilicon
19. LPCVD LTO/PSG
20. LPCVD Nitride
21. LPCVD Nitride
22. LPCVD Polysilicon
23. LPCVD TEOS
24. microfluidics prototyping (uWire EDM, laser uWelding, PDMS process, UV cure) » Polymer Processing
25. Oven
26. Oven, Vapor Prime
27. Oxidation Furnace
28. Parylene Coater
29. PECVD Deposition
30. Plasama Etcher, DRIE
31. Plasma Etcher
32. Plasma Etcher, DRIE
33. Plasma Etcher, Dry Isotropic
34. Plasma Reactive Ion Etcher
35. Spin Coater
36. Spin Coater
37. Spin Coater
38. Spin Develop/Etcher
39. Sputtering System
40. Sputtering System
41. Surface Profiler
42. Surface Profiler
43. Thin Film Stress Measurement System
44. Thin Film Thickness Measurement System
45. Thin Film Thickness Measurement System
46. Wafer Bonder
47. Wet Benches and SRD's
48. Wire Bonder

MEM-C Shared Facilities

1. Bruker Edge AFM » Atomic Force Microscopy
2. Bruker Icon AFM » Atomic Force Microscopy
3. CEM Discover SP Microwave synthesizer » Synthesis and Fabrication
4. Diamond Anvil Cell (DAC) » Spectroscopy
5. Edinburgh FLS1000 luminescence Spectrometer » Spectroscopy
6. Glovebox and transfer stage with integrated microscopy » Optical Microscopy
7. NanoITC isothermal titration calorimeter (ITC) » Thermal Characterization
8. Phosphorus XES Spectrometer » Spectroscopy
9. Pulsed Laser Deposition System » Pulsed Laser Deposition
10. Thermal Evaporator » Thermal Characterization
11. Xenocs Xeuss 3.0 Small Angle X-ray Scattering (SAXS) » X-ray Diffraction

The Nanoscale Fabrication Center (NFC)

1. Four-Point Probe
2. Aligner for EV 801 Bonder
3. Aluminum Wedge Bonder
4. Anneal Oven
5. Anneal Oven
6. Automegasamdri 915B Critical Point Dryer
7. Buffered Oxide Etch Chemical Bench
8. Chemical Bench
9. Chemical Bench ("DAE Bench") » Etching
10. Chemical bench (Prefurnace Clean) » Etching
11. Chemical bench for teaching
12. Chemical bench for teaching
13. Contact Aligner / IR Back Side Aligner
14. Contact Aligner / IR Back Side Aligner
15. Contact Aligner, 3" wafers;
16. Contact Aligners for 4-inch Wafers
17. DC Sputterer
18. Dicing Saws
19. Die Attacher
20. E-beam Evaporator
21. E-Beam Evaporator
22. E-beam Evaporator
23. Elionix ELS-G100 Electron Beam Lithography System » Lithography
24. Fiji G2 Atomic Layer Deposition System » Thin Film Deposition
25. Film Stress Measurement
26. Filmetrics
27. Forming Gas Metal Anneal Furnace
28. Furnace Tube 1
29. Furnace Tube 3
30. Furnace Tube 4
31. Furnace Tube 6
32. General-Use Steam Oxidation Furnace Tube 2
33. Gold Ball Bonder
34. Heidelberg DWL 66+ laser writer lithography system » Lithography
35. high-density plasma RIE
36. III-V Semiconductor Chemical Bench
37. Indium Evaporator
38. Lithography Ovens
39. Low-Temperature Oxide Furnace
40. Metal Etcher
41. Non-Litho Spinner
42. Optical microscope with Camera and PC
43. Optical microscope with Camera and PC
44. Photoresist spincoater for teaching
45. Piranha Bench » Etching
46. PLA-501 Contact Aligner;
47. Plasma Asher & Stripper » Etching
48. Plasma Therm Apex SLR ICP plasma etching system » Etching
49. PlasmaTherm
50. Polysilicon LPCVD Furnace » Thin Film Deposition
51. Probe Station
52. Programmable Photoresist Spinner #2 - SU8
53. Programmable Photoresist Spinners #1 and #3 - General Use
54. Programmable Polymer Oven
55. Programmable Polymer Oven
56. Projection Litho Exposure Stepper
57. Rapid Thermal Annealer
58. Reactive-Ion Etcher
59. RF/DC Sputterer
60. Silicon Deep RIE » Etching
61. Silicon Wet Etch Bench » Etching
62. Solvent Bench
63. Solvent Benches
64. Spin-Rinse Dryer
65. Spin-Rinse Dryer
66. Spin-Rinse Dryer
67. Spin-Rinse Dryer (SRD) » Thin Film Processing and Deposition
68. SU8 Solvent Bench
69. Surface Profilometer (3 units) » Profilometry
70. Thermal Anneal Furnace for Metals ("Aluminum Anneal Tube")
71. Unaxis 790 RIE
72. UV-Ozone Stripper/Cleaner
73. Wafer Bonder
74. Wafer Scribe
75. Wet/Dry Oxidation Furnace
76. Wet/Dry Oxidation Tube, Classroom Bay

The Nanoscale Imaging and Analysis Center (NIAC) at the University of Wisconsin-Madison

1. Bruker D8 Discover Diffractometer X-Ray Diffractometer (XRD) » X-ray Diffraction
2. Bruker Icon AFM » Atomic Force Microscopy
3. Bruker Multimode 8 Atomic Force Microscope (AFM, SPM) » Atomic Content Characterization, Scanning Probe Microscopy, Atomic Force Microscopy, Profilometry
4. Cameca IMS-4fE7 Secondary Ion Mass Spectrometer » SIMS
5. Dynacool PPMS » PPMS
6. FEI Titan Aberration-corrected (S)TEM » Microscopy, Electron Microscopy, Transmission Electron Microscopy, STEM
7. Horiba LabRAM HR Evolution Raman Spectrometer » Image Analysis and Processing, Optical Microscopy, Confocal Fluorescence Microscopy, Optical Characterization, Optical Spectrometry, FTIR/Raman Spectroscopy
8. Hysitron TI950 Triboindenter » Dynamical Mechanical Analysis
9. Leica EM TiC 3X Ion Beam Milling System » SEM
10. Malvern PANalytical X'Pert PRO X-Ray Diffractometer (XRD) » X-ray Diffraction
11. Micro FT-IR Spectrometer » FTIR/Raman Spectroscopy
12. NanoMill
13. PANalytical Empyrean X-ray diffractometer » X-ray Diffraction
14. Tecnai TF-30 300KV Field Emission Scanning Transmission Electron Microscope (FE STEM) » Electron Microscopy, Transmission Electron Microscopy, STEM
15. ThermoFisher Helios G4 UX Plasma Focused Ion Beam/Field Emission Scanning Electron Microscope » Focused Ion Beam
16. Wisconsin MRSEC X-ray Endstation for Nanoscale Transformations (MXNT) » X-ray Diffraction, Thin Film Deposition
17. X-ray Photoelectron Spectrometer (XPS) » XPS
18. Zeiss Auriga Focused Ion Beam FIB/FESEM » Focused Ion Beam, SEM
19. Zeiss Gemini 300 FESEM » SEM
20. Zeiss Gemini 450 FESEM » SEM
21. Zeiss Leo 1530 FESEM/EDS/EBSD » SEM
22. ZYGO 9000 Optical Profilometer » Optical Microscopy, Optical Characterization, Profilometry, Structural Characterization

The Soft Materials Characterization Laboratory (SMCL) at the University of Wisconsin-Madison

1. Auxiliary Equipment » SEM, Scanning Probe Microscopy, Atomic Force Microscopy, Ellipsometry, Optical Spectrometry, Polymer Characterization, Dynamic Light Scattering, Gel Permeation Chromatography, Rheometry, Thermal Characterization, Ovens, Lithography, Furnaces, Polymer Processing, FTIR/Raman Spectroscopy
2. Differential Scanning Calorimeter (DSC) Q100 » Thermal Characterization, Calorimetry, Polymer Processing
3. Gel Permeation Chromatograph GPCmax » Gel Permeation Chromatography
4. JA Woollam IR-VASE Mark II Ellipsometer » Ellipsometry
5. JA Woollam VASE+AR Ellipsometer » Ellipsometry
6. LEO 1550 FESEM » SEM
7. Malvern Zetasizer Nano ZSP » Dynamic Light Scattering
8. Q-Sense E4 quartz crystal microbalance » Polymer Characterization
9. Rheometer - Advanced Rheometric Expansion System (ARES) » Mass/Density Characterization, Polymer Characterization, Structural Characterization, Polymer Processing, Spectroscopy
10. RSA III Dynamic Mechanical Analyzer » Structural Characterization
11. Thermo Scientific DXRxi Raman imaging microscope » Image Analysis and Processing, Spectroscopy, FTIR/Raman Spectroscopy
12. Thermogravimetric Analyzer (TGA) Q500 » Calorimetry, Thermo-Gravimetric Analysis

Imaging and Characterization Facility

1. Bruker Fastscan AFM » Atomic Force Microscopy
2. Bruker multimode AFM » Atomic Force Microscopy
3. Denton Desk V chromium sputtering tool » Atomic Force Microscopy
4. FEI Tecnai Osiris 200kV TEM for material science » Transmission Electron Microscopy
5. FEI XL40 SEM » SEM
6. Fischione 1050 TEM thinning mill
7. Hitachi SU-70 high resolution SEM » SEM
8. KLA Tencor Alphastep 200 profilometer » Profilometry
9. Leica Cryo-Microtome » Microscopy
10. Rotating Anode X-Ray Source » X-ray Diffraction
11. Vistec EBPG 5000+ electron-beam lithography » Lithography

Materials Synthesis Facility

1. Combinatorial sputtering » Synthesis and Fabrication
2. Cryogen-free Physical Property Measurement System (PPMS - Dynacool) » PPMS
3. Molecular Beam Epitaxy (MBE) » MBE
4. Quantum Design Magnetic Property Measurement System (MPMS) » SQUID Magnetometry

Nanofabrication Facility

1. Focused Ion Beam » Focused Ion Beam
2. Glovebox » Synthesis and Fabrication
3. Polishing System » Synthesis and Fabrication

SCSU (Southern Connecticut State University)

1. Dip-pen Nanolithography » Lithography
2. Hitachi Tabletop Scanning Electron Microscope » SEM
3. Ion Mill
4. Microtome
5. Olympus Inverted Metallurgical Microscope » Optical Microscopy
6. Olympus Research Microscope » Optical Microscopy
7. Philips Transmission Electron Microscope » Transmission Electron Microscopy
8. Precision Low Speed Saw
9. TEM specimen Preparation Polisher
10. Zeiss Axio Lab Microscope » Optical Microscopy
11. Zeiss Axio Scope Microscope » Optical Microscopy