MTS Nanoindenter XP
The NanoIndenter performs indentation tests by driving a diamond indenter into the specimen surface and dynamically collecting the applied force and displacement data. Material properties are derived from the load and depth data. Specimens are typically relatively smooth and flat.
Hardness, elastic modulus, and phase angle (from which storage and loss moduli can be calculated) data are produced and can be exported as Excel spreadsheets.
Test positions are targeted using an optical imaging system with a 250X display.
Specimens are typically mounted by gluing to a 1-1/4" (31.75 mm) diameter cylinder with superglue. Specimens as high as 9/16" (14 mm) are easily accommodated. Taller specimens can be tested with some limitations. Specimens less than 3/16" (4 mm) in height can be as large as 4" (10 cm) across, i.e. a 4" wafer.