Zeiss Merlin high-resolution scanning electron microscope is a versatile electron beam characterization tool for semiconductor research, life and material sciences. It is capable of high resolution secondary electron imaging with a resolution of 0.8 nm at 15KV and 1.4 nm at 1 kV with in-lens secondary electron detector. It is also equipped with a retractable 4 Quads and an in-lens energy selective backscatter detectors for back-scattered electron imaging, an unique charge compensation system for imaging of non-conductive materials, and a scanning transmission electron microscopy (STEM) detector for studying of electron-transparent thin film samples. A software to reconstruct 3D surface topography is also available. Accessories include an EDS for X-ray microanalysis and elemental mapping and an EBSD for crystallographic texture study.