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Zeiss Merlin High-resolution SEM

Zeiss Merlin high-resolution scanning electron microscope is a versatile electron beam characterization tool for semiconductor research, life and material sciences.  It is capable of high resolution secondary electron imaging with a resolution of 0.8 nm at 15KV and 1.4 nm at 1 kV with in-lens secondary electron detector.  It is also equipped with a retractable 4 Quads and an  in-lens energy selective backscatter detectors for back-scattered electron imaging, an unique charge compensation system for imaging of non-conductive materials, and a scanning transmission electron microscopy (STEM) detector for studying of electron-transparent thin film samples.  A software to reconstruct 3D surface topography is also available.  Accessories include an EDS for X-ray microanalysis and elemental mapping and an EBSD for crystallographic texture study.