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Seki Technotron Corp. AX5200M 1.5kW Microwave-Plasma Enhanced-Chemical Vapor Deposition system

  • State-of-the-art deposition tool for synthesizing high quality poly crystalline and single crystal diamond films for research and production
  • The system is available with process gases: H2, CH4, O2 and N2
  • Substrate heating up to 900° C
  • Capability for biased substrate nucleation growth