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The Hitachi UHV-H9000 High Resolution Electron Microscope is the first conventional transmission instrument to achieve routine mid 10 ? 10 -11 torr operation. It is equipped with a Gatan Parallel EELS and CCD Camera, both interfaced to computers. Routinely the instrument will resolve at about 0.18nm for bulk spacings and atomic structure of surfaces at about the 0.25nm level.