Description

The CHA Evaporator is a single source electron beam evaporator. It has a lift-off fixture and a planetary fixture for 4" wafers. It can run up to six different materials in a run. the lift-off fixture holds 9 wafers, and the planetary fixture holds 6 wafers each; since there are 3 planetary fixtures that can be used, a total of 18 wafers can be fun at one time.