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KLA-Tencor P-16

Make / Model : 



The KLA-Tencor P-16 Surface profiler provides leading edge surface measurement and analysis performance capability on a Windows XP operating system. Some of the key features of hte P-16 are as follows:

  • Vertical range 0-327 um
  • 2um diamond stylus with a 60 degree cone angle.
  • Substrates sizes from 3mmx3mm up to 200mm in diameter
  • Maximum substrate thickness of 3mm
  • Maximum scan length of 80mm
  • 2D scans
  • 3D imaging
  • Dual view optics
  • Die Grid Navigation
  • Data recalculation
  • Sequence scanning
  • Pattern REcongnition
  • Black and White camera
  • Stress measure
  • Motorized level and rotation
  • Vacuum hold down
  • Expandable data points