Description
The KLA-Tencor P-16 Surface profiler provides leading edge surface measurement and analysis performance capability on a Windows XP operating system. Some of the key features of hte P-16 are as follows:
- Vertical range 0-327 um
- 2um diamond stylus with a 60 degree cone angle.
- Substrates sizes from 3mmx3mm up to 200mm in diameter
- Maximum substrate thickness of 3mm
- Maximum scan length of 80mm
- 2D scans
- 3D imaging
- Dual view optics
- Die Grid Navigation
- Data recalculation
- Sequence scanning
- Pattern REcongnition
- Black and White camera
- Stress measure
- Motorized level and rotation
- Vacuum hold down
- Expandable data points