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The NANOSPEC/AFT is a computerized film thickness measurement system. The Nanospec separates light from a white source into its component wavelengths, from 480 to 800 nanometers. The interference of the light waves is then measured using several algorithms and thckness is determined. This instrument offers programs on thirteen specific film types, relative reflectance, and multipurpose thick film capability. A dielectric film in the range of the instrument extends from less than 100A to 40,000A, with a refelctvity of +/-2% to +/-5%.