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Varian E-beam

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The electron beam evaporator is used to solid dielectrics (no powders) onto substrates. Evaporation is done under a high vacuum in a water cooled bell jar chamber. Evaporation is achieved by heating a source with an electron beam. As the source material evaporates, it forms a thin film on teh samples. Three units control the electron beam: a power supply, source controller and a sweep controller.