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Kratos Axis 165 XPS

Instrument types


Key Specifications:

  • Two x-ray sources: Monochromatic Al and Dual anode (Mg/Al)
  • High sensitivity is achieved with a combination of electrostatic and magnetic lenses, a 165 mm hemispherical analyzer and multi channeltron detection
  • Coaxial charge neutralization system
  • Variable temperature (150-750 K) sample stage
  • XPS imaging (30 micron spot) and multipoint spectroscopy
  • Depth profiling with argon ion bombardment
  • Automated sample stage and XYZ manipulator for angle resolved measurements
  • High vacuum loadlock and preparative chamber
  • Sample holder capable of holding multiple samples
  • Kratos Vision and CASA XPS analysis software