This is a fully computer-controlled instrument from Vacuum Generators that combines two analytical instruments into a single workstation, viz., x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). The XPS subsystem can be run with a normal Al/Mg anode or a monochromatized Al anode for higher energy resolution. A small spot mode allows analysis down to 150 microns. The SIMS subsystem works with a quadrupole mass spectrometer with unit mass resolution up to m/e = 800 and single ion detection capability. A fast entry system permits rapid sample introduction and interchange. A high-pressure cell is also incorporated for simulation of processes occurring at pressures up to 30 atmospheres. A fast entry system permits rapid sample introduction and interchange. A high-pressure cell is also incorporated for simulation of processes occurring at pressures up to 30 atmospheres.