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Microsystems Lab

The Microsystems Laboratory, which is part of the Utah Nanofab, is leading the way towards next generation microsensors, micro-actuators, materials and fabrication technologies. We act as a service provider for on and off-campus industrial institutional research and development partners. Our core focus lies on harsh environment MEMS (i.e. operation of MEMS at high temperatures and in aggressive gas and fluid media), which constitute 90% of future MEMS applications (e.g. in the automotive and biomedical sector).