The Center uses both traditional and nontraditional micro- and nano- scale manufacturing techniques to create the unique devices invented at the center. The Center has significant expertise in inexpensive methods for microfabrication and microfluidics. The classical MEMS and microfabrication capabilities are housed in the University of Utah College of Engineering Microfabrication Labs. These capabilities include: photolithography, bulk and surface micromachining, sputtering, evaporation, PECVD, LPCVD, furnaces, electroplating, MEMS packaging, and related techniques.
The less traditional microscale techniques employed by the center include: soft lithography, polymer micromolding, xurography or knife cutting, thin film lamination, and mechanical techniques. For example, we have developed unique technologies for making monolithic PDMS waveguides and 3-D microfluidic devices. Accordingly, we can integrate optics and fluidics in a single manufacturing step.
The Center also has expertise in nanoscale self assembly using electrostatic layer by layer assembly of polymers, particles, and other charged species. We use this technique to make nanoscale sensors for oxygen, glucose, cholesterol, and other chemicals.
A summary of equipment in the Center is available here.