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Program Application

Contact Aligner / IR Back Side Aligner

Make / Model : 

Karl Suss MA6/BA6

Manually-operated mask aligner and exposure tool. Substrates: 3", 4", or 6" wafers; pieces of wafers possible. Masks: 4", 5", or 7". Alignment to top or bottom face of substrate. Exposure modes: Proximity; soft, hard, or vacuum contact. 350 W UV source. Submicron resolution possible.

Remote Access to Instrument: