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University of Wisconsin-Madison
Wisconsin MRSEC
The Nanoscale Fabrication Center (NFC)
Instrument Technical Primary Contact:
Jerry Hunter
More details about this Instrument
Spin-Rinse Dryer (SRD)
Instrument types
Thin Film Processing and Deposition
Make / Model :
NA
Touchless rinsing and drying of 3" and 4" wafers.
Remote Access to Instrument:
No
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