Features

• X-ray sources: 2.2 kW Philips ceramic sealed tube source
• Wavelength: Cu Ka (1.5405 Å)
• Monochromator: High flux hybrid monochromator or 4-crystal Ge(220)/(440)
• Diffracted beam optics: receiving slits & Ge (220) analyzer for triple axes
• Goniometer: open Eulerian cradle
• Detector: sealed proportional counter
• Resolution: ~5 arcsec in q and 2q-q scans
• Software for data acquisition: X’PERT Data Collector
• Software for data processing: X’PERT Epitaxy and X'PERT Reflectivity

Example of XRD data collected on MRD
 

GaN (002) rocking curve with superlattice peaks

X-ray Reflectivity (XRR) data and simulation of a PMMA film on Si

High resolution x-ray rocking curve data on a multi-quantum well structure