- X-ray sources: 2.2 kW Philips ceramic sealed tube source
- Wavelength: Cu Ka (1.5405 Å)
- Monochromator: High flux hybrid monochromator or 4-crystal Ge(220)/(440)
- Diffracted beam optics: receiving slits & Ge (220) analyzer for triple axes
- Goniometer: open Eulerian cradle
- Detector: sealed proportional counter
- Resolution: ~5 arcsec in q and 2q-q scans
- Software for data acquisition: X’PERT Data Collector
- Software for data processing: X’PERT Epitaxy and X'PERT Reflectivity
Example of XRD data collected on MRD
![](http://www.mrl.ucsb.edu/sites/default/files/mrl_images/instruments/superlattice-xrd.jpg) |
GaN (002) rocking curve with superlattice peaks |
![](http://www.mrl.ucsb.edu/sites/default/files/mrl_images/instruments/PMMA-reflectivity-data.jpg) |
X-ray Reflectivity (XRR) data and simulation of a PMMA film on Si |
![](http://www.mrl.ucsb.edu/sites/default/files/mrl_images/instruments/MBE-superlattice.jpg) |
High resolution x-ray rocking curve data on a multi-quantum well structure |
Related Documents (Manuals, Training, etc.):