Skip to:

MRFN Member Login
Program Application

Equipment Updates at Northwestern Microfabrication Facility

Northwestern University's MRSEC has recently augmented the cababilities of its Materials Processing Microfabrication Facility:
  • The Atomic Layer Deposition (ALD) instrument can be used for deposition of dielectric thin films with conformal film growth on ultra-high aspect ratio features.
  • A Variable Temperature Hall Effect Measurement System (HMS)  is capable of Direct and Derived Measurements as a Function of Field and Temperature: Hall voltage, Resistivity, Hall coefficient, Carrier type / concentration / density, Hall mobility, Magnetotransport.