Nikon 8 Body i-Line
Non-contact Projection Lithogaphy. Configured for 150mm Wafers 5 inch reticle size. resolution 0.5 um NA: 0.5 illumination: i-line reduction ratio: 1 to 5 field size: 20 x 20 or 15.9 x 25.2 alignment accuracy 0.11 lxl plus 3 sigma
MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.
