Description

The KLA-Tencor P-16 Surface profiler provides leading edge surface measurement and analysis performance capability on a Windows XP operating system. Some of the key features of hte P-16 are as follows:

• Vertical range 0-327 um
• 2um diamond stylus with a 60 degree cone angle.
• Substrates sizes from 3mmx3mm up to 200mm in diameter
• Maximum substrate thickness of 3mm
• Maximum scan length of 80mm
• 2D scans
• 3D imaging
• Dual view optics
• Die Grid Navigation
• Data recalculation
• Sequence scanning
• Pattern REcongnition
• Black and White camera
• Stress measure
• Motorized level and rotation
• Vacuum hold down
• Expandable data points