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FEI CM200 FEG-TEM with EDS/EELS

Instrument types

CM200 FEG-TEM is equipped with a Gatan 678 Imaging Filter and a PGT-IMIX EDX system. With a field-emission-gun, this microscope provides a point-to-point resolution of 0.23nm, and an electron probe of 1 nm with energy up to 200KeV.