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Program Application

Nanofabrication Facility


  1. Focused Ion Beam

  2. Glovebox

    The glovebox allows sensitive materials to be handled in an inert atmosphere. Preparation of highly reactive samples or source materials for use in deposition can be performed in the glovebox while avoiding contact with oxygen or air. This is especially important for molecular beam epitaxy where extremely pure source metals, which are often air sensitive, must be inserted into the ultrahigh vacuum environment with minimal contamination or degradation

  3. Polishing System

    The polishing system is used to prepare thin TEM samples