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FEI Helios Nanolab SEM/FIB

Instrument types

This dual-beam FIB/SEM allows simultaneous FIB milling and SEM imaging and is equipped with a STEM detector, Bruker Quantax SDD EDS detector, Omniprobe AutoProbe and Kleindiek nanomanipulation system. Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Sidewinder FIB column provides 5nm resolution at 30kV and low energy milling capabilities.

  • Five gas injection systems for etching/deposition
  • STEM detector
  • Bruker EDS
  • Lithography capabilities
  • Lift out tools for TEM and Atom Probe samples