cold field emission technology -double condenser optics ensures not only the highest resolution;
full control on probe currents from 1pA to over 5nA - ideal for both, observation of even the most sensitive specimens, but also for elemental analysis (EDX) where today's SDD detectors easily will achieve several 10000 counts per second.
a large specimen chamber
equipped with the triple detector super ExB system
Oxford X-max 80 SDD EDS detector
standard Everhart-Thornley SE detector
spatial resolution of 1.0 nm at 15kV and 1.3 nm at 1kV