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Tencor FLX 2320 Thin Film Stress Measurement System

Make / Model : 

FLX 2320

Measures the changes in the radius of curvature of a substrate caused by deposition of a stressed thin film. The change in radius of curvature can be measured over time and as a function of temperature (LN2 Temp to 500 degrees Celsius).

Remote Access to Instrument: 
No