The Dimension 3100 is a large stage microscope operable in many SPM modes, with a vacuum chuck allowing mounting of full wafers for analysis. The Hybrid scanner is closed-loop in X, Y and Z dimensions, permitting precise positional control for nanolithography and nanomanipulation. The Nanoscope V controller permits calibration of cantilever spring constant, high resolution force measurements, and very high digital image resolution. The electrical characterization application modules permit imaging sample capacitance and conductance on the nanoscale, in standard tapping and contact modes and in Torsional Resonance mode.