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FEI Nova NanoSEM 230

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FEI NanoSEM 230

The FEI Nova NanoSEM 230 high resolution field emission SEM is our main imaging tool for nanoparticles, featuring 1nm resolution at 15 KV. A STEM II detector and a vCD detector (for beam deceleration imaging) have recently been added to the standard ETD and TLD detectors. Equipped with a JC Nabity Nanometer Pattern Generation System (NPGS 9.0) this NanoSEM can write patterns down to 20 nm feature sizes.

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