High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size). Oxford CL2 cathodoluminescence system will be attached. Back scattering detector for Z-imaging.
Voltage: 200 - 30 kV; Resolution: 3.0 nm @30kV; 10 nm @3kV.