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FEI Inspect S Electron Scanning Microscope w/ Cathodoluminescence System

Instrument types

High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size).  Oxford CL2 cathodoluminescence system will be attached.  Back scattering detector for Z-imaging.

Voltage: 200 - 30 kV; Resolution: 3.0 nm @30kV; 10 nm @3kV.