Skip to:

MRFN Member Login
Program Application

FEI XL30 Sirion FEG Digital Electron Scanning Microscope

Instrument types

High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size). Back scattering detector for Z-imaging.

Voltage: 500-30keV; Resolution: 1.2 nm @30keV.