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GCA 8500DSW Stepper

The GCA 8500DSW stepper has a 16mm lens with 5x reduction and a numerical Aperture (NA) of 0.35, and uses a mercury arc lamp with a wavelength of 365nm. It is capable of exposing 3", 4" and 6" wafers. It has an automatic wafer handler that can be used for 6" notched wafers. The quartz reticles used in the stepper are 5"x 5" and 0.09" thick.