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PVD PLD-MBE 2500 Pulsed Laser Deposition System

Instrument types

The PLD system has a target manipulator that handles six 2-inch diameter targets. Targets are held in pedestals by gravity so target clamping is not required. The system will allow simultaneous rotation of target and substrate. The system allows for in situ heating up to 950 °C and RHEED measurements.