Skip to:

MRFN Member Login
Program Application

Cameca IMS-4fE7 Secondary Ion Mass Spectrometer

Instrument types

The Cameca 4f-E7 provides depth profile and contamination analysis on a broad range of materials from semiconductors and metals to insulators.

It is equipped with oxygen and cesium primary ion sources for analysis of positive and negative secondary ions and a high resolution (30,000 m/dm) double focussing mass spectrometer.