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RF Dielectric Sputter System

Instrument types
Make / Model : 

Kurt Lesker PVD 75

The PVD 75 RF sputter system features a modular design for deposition of a variety of dielectric materials. The system has manual controls allowing for a wide range of processing options. An optical monitor provides the option for deposition monitoring of optical films at multiple wavelengths in the VIS or IR spectrums. Up to 3 separate films can be deposited sequentially.