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Thin Film Deposition

Instrument

PlasmaTherm RIE/PECVD System @ Central Facility for Microelectronics @ Center for Advanced Materials Research
AJA ATC-2200-UHV sputtering system @ UD Materials Growth Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
AJA ATC-ORION 8000 E-beam Evaporation System @ Nanofabrication and Clean-Room @ UNL Materials Research Science and Engineering Center
AJA Evaporation Chamber @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
AJA Orion Sputter Chamber @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
ATC-2000F AJA Sputtering System @ Nanomaterials & Thin Films @ UNL Materials Research Science and Engineering Center
DC Sputter System @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Denton Thermal Evaporation Chamber @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
E-beam & Thermal Metal Evaporator @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
E-Beam Metal Evaporator @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Electron Beam Evaporator @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Fiji G2 Atomic Layer Deposition System @ The Nanoscale Fabrication Center (NFC) @ Wisconsin MRSEC
Four-Point Probe @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Gaertner Ellipsometer @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
HVEC Thermal Evaporator @ Central Facility for Microelectronics @ Center for Advanced Materials Research
KJL Magnetron Sputtering Tool @ Materials Cluster @ Cornell Center for Materials Research
KSV-NIMA-KN2002-Langmuir-Blodgett-Trough @ Materials Cluster @ Cornell Center for Materials Research
KSV-NIMA-KN4010-Dip-Coater @ Materials Cluster @ Cornell Center for Materials Research
Kurt J. Lesker Co. Lab 18 Thin Film Deposition System @ NanoSystems Laboratory (NSL) @ Center for Emergent Materials
Laurell-WS-400A-Spin-Coater @ Materials Cluster @ Cornell Center for Materials Research
LPCVD (Low-pressure Chemical Vapor Deposition) @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Micro/Nano Fabrication and Cleanroom @ Materials Research Laboratory Central Research Facilities @ Illinois MRSEC
Multiple-Source Supttering Chambers @ Fabrication and Processing @ Materials Research Science Engineering Center
Oxford Instruments Ion-beam Deposition Tool @ Central Facility for Microelectronics @ Center for Advanced Materials Research
Plasma Enhanced Chemical Vapor Deposition System @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Polysilicon LPCVD Furnace @ The Nanoscale Fabrication Center (NFC) @ Wisconsin MRSEC
RF Dielectric Sputter System @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Rudolph Ellipsometer @ Central Facility for Microelectronics @ Center for Advanced Materials Research
SCS G3P-8 Spin Coater @ Cleanroom and Processing Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Semicore Sputter System @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
Sentech SENDIRA FT-IR Ellipsometer @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
Sputtering Deposition System @ Materials Cluster @ Cornell Center for Materials Research
Three-target Magnetron Sputtering System @ Central Facility for Microelectronics @ Center for Advanced Materials Research
UD Materials Growth Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
V&N E-Gun Evaporator @ Materials Preparation and Measurement Laboratory (MPML) @ Chicago Materials Research Center
Varian Thermal Bell Jar Evaporator @ Materials Cluster @ Cornell Center for Materials Research
Veeco GENxplor MBE - chalcogenides @ UD Materials Growth Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Veeco GENxplor MBE - III-V semiconductors @ UD Materials Growth Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Wisconsin MRSEC X-ray Endstation for Nanoscale Transformations (MXNT) @ The Nanoscale Imaging and Analysis Center (NIAC) at the University of Wisconsin-Madison @ Wisconsin MRSEC

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