The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.
It combines high accuracy and precision with a wide spectral range up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:
• Reflection and Transmission Ellipsometry
• Generalized Ellipsometry
• Reflectance (R) intensity
• Transmittance (T) intensity
• Cross-polarized R/T
• Depolarization
• Scatterometry
• Mueller-matrix
For more information see
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