- 1.4nm resolution at 1kV with beam deceleration
- 1.0nm resolution at 15kV -Super ExB filter allows low kV, high res, BSE imaging and energy filtering
- Large 5axis computer eucentric stage (110mm x 110mm)
- STEM detector for bright and dark field STEM imaging TMP pumped
- Infrared chamberscope and 6 specimen exchange airlock
MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.
