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AES-Physical Electronics 670; 50nm spatial resolution; in situ fracture stage

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A focused electron beam (3-20 keV) is scanned across the sample surface. Atoms near the surface are ionized, and a fraction of the ionized atoms relax via the Auger process. The spectrometer ultimately measures the kinetic energy distribution of a portion of the Auger electrons that are emitted from the sample. The technique is inherently surface sensitive because the majority of the measured Auger electrons originate in the outer 5-10 nm of the sample surface.

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