This system uses the Nicolet 6700 FT-IR Spectrometer as a source, allowing for FT-IR ellipsometry. The system is capable of measuring psi and delta between 400 cm-1 and 6000 cm-1 using a DTGS detector. Ellipsometry is useful for measuring layer thickness and indexes of refraction for multi-layer systems. Infrared ellipsometry is especially useful accessing layers that may not be transparent in the visible range. This system can also be useful for probing organic materials.