(Substrate Preparation) The UV/Ozone cleaner consists of a drawer in a stainless steel housing. When closed, the drawer holds a substrate beneath a serpentine quartz envelope mercury lamp. The unit is equipped with an exhaust fan that pulls fresh air into the cleaner and exhausts the ozone-containing air into the building's exhaust system. The mercury lamp emits ultraviolet photons (around 253 nm) that both irradiate the substrate and interact with atmospheric oxygen to produce ozone. The ultraviolet light and ozone interact with the substrate surface to remove trace organics and provide a uniform surface termination. This system has a standard operating procedure.