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Microfabrication / Microelectronics / Clean Room

Instrument

Class 1000 Cleanroom @ Fabrication and Processing @ Materials Research Science Engineering Center
Deposition (ALD, Evaporators, PECVD, PLD, Sputterer) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Dry Box @ Molecular Design Institute @ NYU Materials Research Science and Engineering Center
Dry Etch (Asher, Chlorine ICP, Fluorine ICP, Ion Mill, Plasma Cleaner) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Film Casting (E-beam SBU1, E-beam SBU2, Photo SBU1, Photo SBU2, SU-8 SBU) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Glass Cutting Board @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
Glove Box @ Shared Materials Instrumentation Facility (SMIF) @ Research Triangle MRSEC
Glove Box @ Synthesis Laboratory @ Renewable Energy Materials Research Science and Engineering Center
Jelight Model 42 UVO-Cleaner @ Thin Film Processing Lab @ Renewable Energy Materials Research Science and Engineering Center
Lithography (E-beam Writer, Laser Writer, Mask Aligner) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
MDI Cleanroom @ Molecular Design Institute @ NYU Materials Research Science and Engineering Center
Metrology (Ellipsometer, Four-Point Probe Station, Microscopes, Profilometer, SEM) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Micro/Nano Fabrication and Cleanroom @ Materials Research Laboratory Central Research Facilities @ Illinois MRSEC
Miscellaneous (Critical Point Dryer, Developing Station, Mask Cleaner Station, Ozone Cleaner, Wet Benches) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Obducat AB Nano Imprint Lithography system - Nanoimprinter @ The Nanoscale Fabrication Center (NFC) @ Materials Research Science and Engineering Center on Structured Interfaces
Packaging (Dicing Saw, Wire Bonder) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials
Thermal Processing (HMDS Oven, Rapid Thermal Processor, Tube Furnace, Vacuum Ovens) @ University of Delaware Nanofabrication Facility @ University of Delaware Center for Hybrid, Active, and Responsive Materials

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