The ZYGO white light interferometer (profilometer) is a tool for characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are nondestructive, fast, and require little to no sample preparation. Profile heights ranging from < 1 nm up to 20000 nm at high speeds, independent of surface texture, magnification, or feature height! The most robust measurements are on samples with a sufficiently thick and reflective surface but high quality measurements can also be made on thin metal films, translucent structures and surfaces with deep crevices. There are several objective lenses with varying numerical apertures that can be used to suit you sample type and topography.

FROM ZYGO:
Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.