The Hitachi SU-70 is one of the highest resolution scanning electron microscopes available today, providing 1 nm resolution, 0.5 to 30 kV accelerating voltage, field immersion operation, and an energy filtered BSE detector. The instrument is equipped with an energy dispersive x-ray detector, a standard scintillator in the sample chamber, and an additional secondary detector above the objective pole. Dual objective magnets allow the user to switch between field-immersion and non-field modes. The thermal (Schottky) field emission electron source provides up to 200 nA of probe current for very fast x-ray maps.